GB 03386 - Edition 03 - Jan. 12
3/3
G 150
Pumping curves
0,001
0,010
0,100
1,000
10,000
0,000 0,500 1,000 1,500 2,000 2,500 3,000 3,500
Inl
e
t pressure
-m
bar-
(hPa)
Foreline pressure -mbar (hPa)
ATH500M & MT DN160
N2 , limit
limit of continue operation
ATH500M water cooling 25°C
Limit of continue operation
ATH500M forced air cooling 20°C
Limit of continue operation
ATH500MT water cooling 20°C ; T° set to 65°C
adixen Vacuum Products - Operating instructions - ATH 500 M-MT
adixen Vacuum Products - Operating instructions - ATH 500 M-MT