GB 03391 - Edition 03 - Apr 11
1/2
B 330
Nitrogen purge connections
Characteristics of
filtered dry nitrogen
supply
A filtered dry nitrogen supply with the following characteristics is
required:
- H
2
O concentration : < 1 ppm
- O
2
concentration : < 1 ppm
- Dew point < 22°C
- Dust < 1 μm
- Oil vapor < 0.1 ppm
- Absolute pressure of 1 to 1.2 bar.
The purge flow is continuous.
The integrated nitrogen flow reduction device controls the pressure
and guarantees a flow rate of 50 SCCM at pressure 1.1 bars.
When used in dusty conditions, replace the filter regularly.
Purge device
for DN16 port
(50 sccm)
Filtered air or
N
2
purge
ATHM
When the inert gas purge is stopped, the pumped gases can pass from
rough vacuum side to high vacuum side and damage the maglev bearings.
It is advised to maintain the purge flow as long as the rotor is running to
protect pump internal parts.
The maximum pressure of the purge must not exceed 2 bar.
M Model
Filter
MT Model
VCR
Fitting
Connect directly the nitrogen pipe instead of the filter or the purge
plug (connection 1 / 8 BSPP), or on the VCR connection (depending
on pump model).
Connection
adixen Vacuum Products - Operating instructions - ATH 500 M-MT
adixen Vacuum Products - Operating instructions - ATH 500 M-MT
