2/2
B 330
Nitrogen purge connections
GB 03391 - Edition 03 - Apr 11
Valve with built-in
purge device
(50 sccm)
This is an accessory directly installed on the ATH500M models
(
B333
).
Filtered air or
N
2
purge
ATHM
When using this valve, close it before making a leak detection test.
Adjust the flow rate
Feed the nitrogen purge
throughout pumping according
to the flow rate and pressure
value in the scale given.
20
1.0
1.1
1.2
1.3
1.4
1.5
70
60
50
40
30
Flow rate (SCCM)
Purge
50 SCCM
Absolute pressure at inlet (bar)
The power of the valve is the responsibility of the customer (24 VDC).
adixen Vacuum Products - Operating instructions - ATH 500 M-MT
adixen Vacuum Products - Operating instructions - ATH 500 M-MT
