GB 03386 - Edition 03 - Jan. 12
1/3
G 150
Pumping curves
ATH 500 M-MT DN100 ISO-F with inlet screen (without purge)
0
50
100
150
200
250
300
350
1,E-04
1,E-03
1,E-02
1,E-01
1,E+00
Ar DN100
N2 DN100
He DN100
H2 DN100
Inlet pressure (mbar)
Pumping Speed (l/s)
1
10
100
1000
10000
1,E-04
1,E-03
1,E-02
1,E-01
1,E+00
Ar DN100
N2 DN100
He DN100
H2 DN100
Inlet pressure (mbar)
Flow rate (sccm)
adixen Vacuum Products - Operating instructions - ATH 500 M-MT
adixen Vacuum Products - Operating instructions - ATH 500 M-MT