Pfeiffer Vacuum adixen ATH 500 M Operating Instructions Manual Download Page 15

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A 210

The pump operating principle

GB 03361 - Edition 02 - June 09

The hybrid-

turbo pump in an

installation

At the pump exhaust, the gases are evacuated to atmosphere by a
primary pump.
The ATHM compression ratio is set by the design. The pumping
performances depend on the primary pump and on the installation.

Chamber

to be

pumped

Secondary

pumping

INLET

PRESSURE

ATMOSPHERIC
PRESSURE

Primary

pumping

Primary vacuum

Secondary vacuum

adixen Vacuum Products - Operating instructions - ATH 500 M-MT

Summary of Contents for adixen ATH 500 M

Page 1: ...original version Betrieb B t i b Operating instructions Operating instructions Translated from original version Translated from original version Betrieb Betrieb ATH 500 M MT Magnetically levitated tu...

Page 2: ...rerate vacuum by pumping on gases but no liquids neither solids It is dedicated for running in industrial environments The integrator of this component must provide all operator safety measures mainly...

Page 3: ...l rights reserved including copying this document in whole or any part without prior written authorization from adixen Vacuum Products Specifications and information are subject to change without noti...

Page 4: ...ction B 400 Safety instructions and electrical connections B 430 Remote control connection wiring B 450 RS 232 or RS 485 link wiring Chapter C OPERATION C 100 Safety instructions for product use C 200...

Page 5: ...n in ensure operators know the safe practices to apply when using the pro duct Before switching on the appliance study the user s manual and make sure you follow the safety instructions it gives You c...

Page 6: ...tions before use Operating status 48 V 12 A Power supply Do not touch when the pump is running Use of glove is recommended Moving parts present Heavy object LOCK Lock the electrical connector before u...

Page 7: ...mp operating principle Pumping principle The hybrid turbo pump in an installation The back up bearings Variation of the pump rotational speed A 400 The technical characteristics The performances of th...

Page 8: ...nbalance of the rotor Maintenance free Inert gas purge Eliminate corrosion of the motor and magnetic bearing coils Battery free In case of a power failure the pump motor acts like a generator to trans...

Page 9: ...control the pump from a computer The serial link RS 485 allows the installation and the control of many pumps in a network B 450 and C 800 6 Remote connector The remote control connector is used for...

Page 10: ...icator lights Idem ATH 500 M 8 Power supply connector Idem ATH 500 M 9 Heater band The heating band keeps the inner surface of the pump up to 65 C to avoid condensation effects The temperature is cont...

Page 11: ...ir cooled ATH 500 M Model The fan must be supplied by an external power supply 48 VDC either ordered as an accessory A510 or provided by the customer Fan adixen Vacuum Products Operating instructions...

Page 12: ...tion of Reference Position return Electro magnet Correction Position sensor Z X X Y Y Movements in relation to these axes are monitored by position sensors According to the position data recorded the...

Page 13: ...osit built up during the life time of the pump are automatically compensated by the unbalanced force rejection control It ensures the lowest possible levels of noise and vibration Stator geometric axi...

Page 14: ...ultimate vacuum The molecular drag section provides a high compression ratio and extends the forevacuum tolerance up to the range of mbar Dry back up bearings Exhaust Cooling Magnetic levitated bearin...

Page 15: ...mary pump The ATHM compression ratio is set by the design The pumping performances depend on the primary pump and on the installation Chamber to be pumped Secondary pumping INLET PRESSURE ATMOSPHERIC...

Page 16: ...f incidents For maximum life time of the rotors see D 150 Battery free In case of a power failure the motor acts like a generator supplying enough power for the magnetic bearings When the rotation spe...

Page 17: ...1 35 1 8 1 28 1 7 Maximum permanent premissible exhaust pressure 4 N2 Torr mbar 3 5 4 65 1 28 1 7 Maximum heating temperature C N A 65 Leaktightness mbar l s 5 10 8 Ultimate pressure 1 Torr mbar 1 10...

Page 18: ...ansient overvoltages typically present on the mains supply Pollution degree applicable Maximum relative humidity Accept temporary overvoltages on the power line C m ft Indoor only 5 T 45 2000 6562 Cat...

Page 19: ...5 130 116 1 10 2 inch 0 47 7 85 8 76 8 75 11 48 5 12 4 57 0 4 DN 100 CF F mm 16 209 3 232 5 232 2 304 9 148 5 130 2 8 6 16 109 5 9 8 inch 0 63 8 24 9 15 9 14 11 89 5 85 5 13 0 34 4 31 0 39 d1 ELECTRO...

Page 20: ...SCREEN WATER CABLE Ra1 6 25 M4 hole to connect the pump to the earth on D152 Dimensions mm inch ATH 500 MT Inlet flange E H J K L D d1 d2 N CG CG1 DN 160 ISO F mm 16 159 3 182 5 182 2 254 9 225 200 11...

Page 21: ...V DC 180 264 V 47 63 Hz 114866 delivered without power cable Mounting bolts kit Screws and washers used to secure the pump on the installation Flange type P N DN160 ISO F DN 100 160 CFF 110676S 118690...

Page 22: ...haust pump The isolation valve is used to maintain the vacuum in the chamber while the pump is reset to atmospheric pressure See the manufacturer s products catalog Flange type P N 100 CF F 160 CF F 3...

Page 23: ...specifications Inlet flange installation conditions B 310 Inlet and exhaust connections B 330 Nitrogen purge and air inlet valve device connections B 333 Assembly of the purge kit B 340 Water cooling...

Page 24: ...r on our website We took care to provide you with a clean product To keep it in this condition unpack it only in contamination free area and at final place of use The performance and operational safet...

Page 25: ...nded to secure the maglev turbopump installation to prevent any safety hazard to the user in standard operating conditions B 300 Risk of cut injury The access to the rotor of a turbomolecular pump wit...

Page 26: ...ed over 25 of LEL for that flammable material For non clean process If loss of purge flow creates a significant risk then the purge flow must be monitored externally and a response to loss of purge fl...

Page 27: ...circuit and nitrogen purge are pressurized hazardous energies Release pressure before servicing 1 for the N2 purge disconnect the gas line 2 for the water cooling circuit disconnect the input connect...

Page 28: ...n applications where solid particles or condensable gases are present we advise on avoiding any deposition into the pumping line Contact our customer service The manufacturer guarantees the right oper...

Page 29: ...operator regarding the probable hazards This label informs the user that moving parts present inside the pump coud cause personal injury like crushing or cutting The user must keep all body parts away...

Page 30: ...ee environment at an ambient temperature between 5 C and 50 C for a period of 1 year maximum If you need to store a pump which has run on clean process don t forget to blow out the water line and to p...

Page 31: ...The product is supplied with the inlet and exhaust blancked off This prevents foreign bodies entering the pump during transport and storage Do not remove these blanking plates until you are ready to i...

Page 32: ...to the customer s handling device using the threaded holes located at the pump housing A400 The equipment frame on which the pump is installed must be sufficiently rigid to absorb the kinetic energy o...

Page 33: ...al failure an improperly installed pump could be ejected from the equipment if the kinetic energy was transferred to the pump body Installations specifications Chamber Equipment Frame Maglev pump conn...

Page 34: ...let flange and can impact on the plate of the valve or any other part of the system If this is placed close to the turbo pump and if it has high stiffness the impact can create a high axial load on th...

Page 35: ...ng moment Max KNm 6 Duration ms 0 5 Delay ms 0 Axial force Max KN 0 to 110 Duration ms 0 3 Delay ms 0 Max axial force occurs if the pump inlet is obstructed with high stiffness parts There is no load...

Page 36: ...nch according to the specified values lower torque risk of loosened bolts higher torque risk of damaging the bolts We strongly recommend the use of ISO F or CF F flanges ISO K type flanges are not rec...

Page 37: ...mping line check for leaks along the entire line to ensure proper connections pump pipes valves etc Pollution risk Unclean and contaminated component use can increase the pumping down time Use only dr...

Page 38: ...ow chamber venting without stopping the pump At exhaust When pumping on corrosive gases or aggressive gases the gas can cause injury or death The exhaust of the turbopump must be connected to roughing...

Page 39: ...replace the filter regularly Purge device for DN16 port 50 sccm Filtered air or N2 purge ATHM When the inert gas purge is stopped the pumped gases can pass from rough vacuum side to high vacuum side a...

Page 40: ...ing a leak detection test Adjust the flow rate Feed the nitrogen purge throughout pumping according to the flow rate and pressure value in the scale given 20 1 0 1 1 1 2 1 3 1 4 1 5 70 60 50 40 30 Flo...

Page 41: ...purge plug from the purge port 3 Screw the union 6 on the purge port 4 Install the assembly 2 on the top of the electronic box using screws 5 through the plate 5 Screw N2 gas line in the union 6 6 Ti...

Page 42: ...in the worst case a complete cleaning and overhaul of the water circuit The presence of micro organisms like aquatic weed and micro biological substances like bacteria can lead to cooling problem in...

Page 43: ...omponents there is a risk of electrical discharge in case of a leak at the water fitting connection Water cooling connections MT model Provide a water inlet pipe and a tap to adjust the flow rate Conn...

Page 44: ...upply supplied by the customer The accessory suggested by the manufacturer A510 is used to power the pump and the fan Perform wiring of the fan in accordance with the marks of the terminals and son se...

Page 45: ...during electrical connection Disconnect any main power sources from the product prior to servicing An IEC 417 5019 symbol is located on the electric device Differential circuit breaker In case of ins...

Page 46: ...n the electric installation Put it correctly easily accessible by an operator Mark it visibly as an electrical interrupting device of the product ATH 500 electrical connection The pump runs with a 48...

Page 47: ...it in 48VDC The external power supply accessory allows to power the fan 6 If the pump is equipped with a purge valve connect the valve to the 24 VDC power supply customer supplied ATH 500M only 5 Chec...

Page 48: ...the pump body and the earth connection point must be 0 1 Ohm at 25 A ATH500 V2 High vacuum isolation valve Integrated electronic N2 Water valve Purge valve Air valve Roughing isolation valve V1 Rough...

Page 49: ...andby 12 V DC 20 mA GND REMOTE The inputs dry contacts Sub D 15 Pts Fem External power supply 12 24 V DC 15 Remote function if Remote hard mode selected Remote start stop 14 15 Active signal starts th...

Page 50: ...T contact is closed following the appearance of any fault temperature frame motor etc The contact is open if there are no faults At speed 1 6 The AT SPEED contact is closed when the selected speed is...

Page 51: ...terminal ready DB 9 contacts male connector Examples of possible connection RS 232 with a single controller Serial link RS 485 1 5 9 6 1 9 6 5 RS 232 connector on ATH 500 M pump Parallel type connecti...

Page 52: ...instructions for product use C200 The front panel with operating status C300 Configuring the ATH 500 M MT for the application C800 Detailed description of RS 232 and RS 485 commands adixen Vacuum Pro...

Page 53: ...t having disconnecting the power line cable Do not operate the pump until it is securely fixed If the pump seizes the stored energy of the rotor may cause further damage and injury to people B300 Risk...

Page 54: ...in cable If this last one remains connected some components will still be energized Be sure that the controller status is visible from the operator otherwise disconnect the cable from the pump Located...

Page 55: ...reen flashing The pump rotational speed is higher than the selected speed decrease of the selected speed during operation 4 Yellow liting Standby mode selected 5 Red liting The pump is faulty Red flas...

Page 56: ...s Inhibition mode OPT 25 0 inactive 1 active 0 Thermostatage mode OPT 29 0 inactive 1 active 0 for ATH 500 M 1 for ATH 500 MT Contact mode OPT 33 0 Rotating 1 Accelerating 0 PARAMETERS RS COMMANDS VAL...

Page 57: ...pecific number to each of the products making up a network Note it is important to note down the number allocated to each device DEF List of the faults Syntax Result adrDEF CR List of the faults histo...

Page 58: ...ype and the software revision of variable drive superviser LEV10 Returns the state of the parameters defined by SET Syntax adrLEV10 CR Result adr nnnnn sssss 00000 0 ccccc eeeee 00000 0000 0000 jj kk...

Page 59: ...ING closed contact if speed 120rpm n 1 ACCELERATING closed contact in phase of progress RDI Returns the serial number of the product Syntax adrRDI CR Result adr A123456789 CR RPM Defines the speed set...

Page 60: ...the parameters in a reply Syntax adrSEP nnn CR nnn 3 digit decimal value of the ascii code of the desired charac ter with leading zeros condition 000 nnn 255 Result adr OK or adr ErrX if error Allows...

Page 61: ...N ON SSS 2 s2 pump status Bit 7 6 Fault 5 Warning temp 4 Braking 3 Nom speed and Temp 2 Accele rating 1 Start 0 Power 0 OK OK OFF OFF OFF OFF 1 1 fault warn T ON ON ON ON SSS 3 s3 valve status Bit 7 6...

Page 62: ...p temp 18 0 19 0 20 0 Self check 21 0 22 0 23 0 24 0 TMP Defines the operating state of the turbomolecular pump Syntax adrTMPON CR start pump rotation adrTMPOFF CR stop pump Result adr OK or adr Err3...

Page 63: ...ser s Manual Detailed contents D D 100 Safety instructions for product removal D150 Maintence frequency D 200 Diagnosis and Troubleshooting adixen Vacuum Products Operating instructions ATH 500 M MT a...

Page 64: ...ong as the rotor is moving and without having disconnecting the power line cable After pumping on corrosive or toxic gases it is strongly recommended to seal the pump with blanking plates in case of r...

Page 65: ...ety form attach it to the product before shipping to the service repair office closest to you How to contact us The overhaul must be performed by manufacturer s trained personnel Contact nearest servi...

Page 66: ...based on the rotation speed and the landing duration Initial percentage value is set at 100 When this percentage reaches 0 an alarm is generated pump can t restart and back up ball bearings need to be...

Page 67: ...d to the frame Check that there are no vibrations on the pump frame Check that the attachment screws are correctly fastened problem can be caused by an anti vibration flagstone Contact the Customer Se...

Page 68: ...uctions Detailed contents E E 100 Shipping procedure for contaminated pumps Inlet port Exhaust port Purge port Exhaust port pressurisation Rough decontamination procedure adixen Vacuum Products Operat...

Page 69: ...r you return the product to an adixen repair service center you must comply with the requirements of the Procedure for returning adixen products fill in the safety questionnaire available in appendix...

Page 70: ...haracteristics of filtered dry nitrogen supply A filtered dry nitrogen supply with the following characteristics is required Dew point 22 C Dust 1 m Oil 0 1 ppm Absolute pressure of 1 to 1 2 bar Descr...

Page 71: ...10 2 Pressurize the pump Blank the inlet port and the purge port Pressurize the pump with dry nitrogen to an absolute pressure of 1 1 bar using the injector N2 adixen Vacuum Products Operating instru...

Page 72: ...s ATH 500 M MT Operating instructions Detailed contents F F 000 Spare parts Instructions of use F200 First level of maintenance needed adixen Vacuum Products Operating instructions ATH 500 M MT adixen...

Page 73: ...l safety conditions of the equipment In such cases the EC declaration of conformity becomes null The manufacturer withdraws responsibility for such operations Besides counterfeiting and unfair trading...

Page 74: ...ly the dust filter when used in dusty air P N Dust filter 106229 A complete range of connecting accessories is available in the manufacturer s catalogue flanges fittings Electrical cable of the air co...

Page 75: ...r s Manual Detailed contents G G 100 Declaration of conformity G 150 Pumping curves G 200 Safety Questionnaire G 1000 Hand Held Remote HHR adixen Vacuum Products Operating instructions ATH 500 M MT ad...

Page 76: ...GB 03387 Edition 02 Jan 12 1 1 G 100 adixen Vacuum Products Operating instructions ATH 500 M MT adixen Vacuum Products Operating instructions ATH 500 M MT...

Page 77: ...1 E 03 1 E 02 1 E 01 1 E 00 Ar DN100 N2 DN100 He DN100 H2 DN100 Inlet pressure mbar Pumping Speed l s 1 10 100 1000 10000 1 E 04 1 E 03 1 E 02 1 E 01 1 E 00 Ar DN100 N2 DN100 He DN100 H2 DN100 Inlet p...

Page 78: ...E 04 1 E 03 1 E 02 1 E 01 1 E 00 Ar DN160 N2 DN160 He DN160 H2 DN160 1 10 100 1000 10000 1 E 04 1 E 03 1 E 02 1 E 01 1 E 00 Ar DN160 N2 DN160 He DN160 H2 DN160 Inlet pressure mbar Pumping Speed l s F...

Page 79: ...Foreline pressure mbar hPa ATH500M MT DN160 N2 limit limit of continue operation ATH500M water cooling 25 C Limit of continue operation ATH500M forced air cooling 20 C Limit of continue operation ATH5...

Page 80: ...f explosion fire risks for the environment Please indicate the chemical formula and name of the gases or substances that have been in contact with the equipment pump detector gauge or accessory Biolog...

Page 81: ...S RELATED CONTAMINATION Chimique The equipment will be accepted only with a written decontamination certificate no yes yes yes no no no yes no yes no yes no yes Chemical name or symbol Risks and preca...

Page 82: ...ter ENTER Configuration validation key Press to validate the selection of a menu a parameter or a value Press to validate an answer to a requested information STATUS Display access key Press to leave...

Page 83: ...and identifies the pumps to which it is connected The equipment is identified the program version is displayed than communication test is done In the meantine the Indicator lights are tested by light...

Page 84: ...E R F A U LT WA R N I N G B E A R I N G The bearing life time remaining ENTER ENTER BEARINGS 100 00 20 S T AT U S F A U LT WA R N I N G B E A R I N G ENTER ENTER War 01 20h25m10s W20 BEARING S T AT U...

Page 85: ...y the Profibus address or DeviceNet address data rate RS 232 SPEED 9K6 19K2 38K4 57K6 9K6 Modify the RS 232 speed RS 232 ECHO ON OFF OFF Authorize or not authorize the echo of characters received on t...

Page 86: ...endable Customer Friendly Customer Friendly You are looking for a You are looking for a perfect vacuum solution perfect vacuum solution Please contact us Please contact us Pfeiffer Vacuum Products Gmb...

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