GB 03362 - Edition 03 -- Jan 12
1/4
A 400
Technical characteristics of the pumps
The performances
of the pumps
Characteristics
UNITS
ATH 500 M
ATH500MT
Flange (in)
DN 100 ISO-F
DN 160 ISO-F
DN 160 ISO-F
Flange (out)
DN 25 ISO-KF
DN 40 ISO-KF
N2 purge flange
1/8 BSPP (ISO 228)
1/4VCR
Rotation speed
rpm
50000
Standby speed
rpm (Hz)
15 000 (250) to 50 000 (833)
Pumping speed *
N2
l/s
330
520
Ar
l/s
300
500
He
l/s
280
350
H2
l/s
170
190
Compression ratio (ISO 5302)
N2
2x10
7
Ar
8x10
6
He
1x10
4
H2
2x10
2
Inlet vacuum max
(3)
N2
mbar
1
0.04
Ar
mbar
1.0
0,02
He
mbar
10
> 0.1
H2
mbar
10
> 0.1
Gas throughput
(3) **
N2
SCCM
4000
500
Ar
SCCM
2500
300
He
SCCM
> 10000
> 1000
He
SCCM
> 10000
> 1000
Maximum continuous exhaust pressure
(4)
N2
Torr/mbar
1,28/1,7
1,35/1,8
1,28/1,7
Maximum permanent premissible
exhaust pressure
(4)
N2
Torr/mbar
3,5/4,65
1,28/1,7
Maximum heating temperature
°C
N/A
65
Leaktightness
mbar/l/s
<5.10
-8
Ultimate pressure
(1)
Torr/mbar
< 1.10
-8
Maximum baking temperature
°C
120
Recommanded purge flow rate
SCCM
50
Sound level : EN ISO 2151 (1m distance) at
nominal speed
dBA
< 42
Vibration level at nominal speed
μm
< 0.01
Mounting orientation
Any
Pump Protection Index
better than IP 42
(1)
With ISO-K, ISO-F flange, better with CF-F flange.
(3)
With a low exhaust pressure, depends on external conditions of water temperature, water flow, environment
temperature.
(4)
Reduced max. flow, ultimate pressure without flow speed loss ; depends on environment conditions.
* Without inlet sreen
** At full rotational speed (cold for M, at 65°C for MT) water temperature = 25 °C
adixen Vacuum Products - Operating instructions - ATH 500 M-MT
adixen Vacuum Products - Operating instructions - ATH 500 M-MT
