GB 03357 - Edition 04 - June 12
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ATH 500 M-MT
Magnetically levitated turbo pumps
Welcome
Dear Customer,
You have just purchased
an adixen magnetically
levitated turbo pump.
We would like to thank
you and are proud to
count you as one of our
customers.
This product has benefited
from adixen Vacuum
Products many years of
experience in the field
of turbomolecular pump
design.
In order to ensure the best
possible performance of
the equipment and your
complete satisfaction in
using it, we advise you to
read this manual carefully
before any intervention
on your pump and to pay
particular attention to the
equipment installation
and start-up section.
This pumping component is designed to gererate vacuum by pumping
on gases, but no liquids neither solids. It is dedicated for running in
industrial environments.
The integrator of this component must provide all operator safety
measures mainly against hot surfaces.
This pumping component must not operate in an area with risk of
explosion. Consult us to study a solution.
S
EMICONDUCTOR
APPLICATIONS
: plasma etching, Ion implantation,
sputtering, plasma deposition.
O
THER
A
PPLICATIONS
: research and development, high energy
physics, space simulation, accelerators.
O
THER
INDUSTRIES
: glass-coating, flat panel display, leds, deposition
coating, hard disk manufacturing.
A
DVANTAGES
:
High throughput - Quiet and clean vacuum - Corrosion proof -
High MTBF - Minimum size, volume and weight -
Smart and compact electronic controller - Reliability -
Maintenance free - Battery free - Easy integration.
A
PPLICATIONS
:
adixen Vacuum Products - Operating instructions - ATH 500 M-MT