Oxford Instruments OpAL, System Manual

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System Manual
Contents
1. Health and Safety........................................................................................................3
2. Description...................................................................................................................3
2.1 Introduction ........................................................................................................................3
2.2
Major components .............................................................................................................4
2.3 Automatch control .............................................................................................................5
2.3.1 RF generator panel .....................................................................................................5
2.3.2 RF automatch panel....................................................................................................5
2.4 Matching component layouts............................................................................................6
2.5 Sense and control PCB........................................................................................................7
3. Test and setting up......................................................................................................8
3.1 Disabling the RF generators ..............................................................................................8
3.2 Overview .............................................................................................................................8
3.3
Procedure ............................................................................................................................9
4. Operator adjustment ................................................................................................13
4.1 DC bias / Peak-to-peak switch setting.............................................................................13
5. Troubleshooting ........................................................................................................14
5.1
Fault diagnosis chart ........................................................................................................14
5.1.1 Amplifier gain adjustment.......................................................................................15
5.1.2 Drive motor shaft to capacitor spindle alignment .................................................16
5.2 Link Settings......................................................................................................................17
5.3 Changing the RF components .........................................................................................18
5.4 Adjustment of capacitor park positions..........................................................................19
6. OIPT locations worldwide.........................................................................................20
Fig 1: The Oxford Instruments Plasma Technology automatch unit.........................................3
Fig 2: Typical RF generator and RF automatch panels ...............................................................5
Fig 3: Matching component layouts............................................................................................6
Fig 4: Sense and control PCB layout ............................................................................................7
Fig 5: Capacitor shafts rotation direction .................................................................................10
Fig 6: Component locations .......................................................................................................11
Fig 7: LK102 and LK2 settings ....................................................................................................15
OIPT Automatch Unit
Issue 6: September 05 Page 2 of 20
Printed: 16-Nov-07, 9:26