System Manual
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All processes are automatically data-logged. The interval between logging events is set in the
Recipe screen.
The Process Datalog facility allows you to view process data runs and associated comments.
The facility comprises three pages:
a)
SELECT LOG page – allows you to select the process data to view.
b)
RUN LOG page – lists the selected process data, for all runs except Leak detection
runs and MFC calibration runs, with respect to time.
c)
Leak detection and MFC calibration log page – displays the Leak detection runs and
MFC calibration runs in text and graphical formats.
These pages are described in the following text.
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The Select Log page is displayed by selecting the
Process
button, then the
Log View
option.
Fig 5-6: Typical select Log page
The page comprises a list of logged events, which can be filtered by type, batch name and
time. When the required events have been selected, they can be viewed on a Log View page.
Operating Instructions
Printed: 06 November 2007 09:42
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Generic (OpAL Plasma) Issue 1: Oct. 07
Summary of Contents for OpAL
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