Plasmalab and Ionfab
Oxford Instruments Plasma Technology
Health and Safety
Health and Safety
Issue 18: April 2010
Page 1-12 of 24
Printed:06 April 2010, 09:32
If toxic, flammable or corrosive precursors are to be used, the entire system must be
installed in accordance with best practice for the semiconductor production industry.
1.4.7.5
If no local guidelines are available, the regulations contained in U.S. documents UBC
the Micro-Electronics Industry’
COP CP18, ISBN 0260 - 4809, available from BCGA or ECIF.
1.4.7.6
.4.7.7
Precursor cabinets supplied by OIPT incorporate a 100mm diameter extraction collar. If
.4.7.8
stem can withstand corrosion or combustion if
.4.7.9
y of the precursor lines to reduce the risk of
.4.7.11
.4.7.12
nufacturers' manuals and
a nitrogen purging facility, must always be purged during a
.4.7.13
ry two weeks
.4.7.14
ors on the same manifold. Consider the precursors that
been fitted previously, before installing a new precursor.
1.4.7.15 Do not overheat precursors as dangerously high pressures may be produced. Never
heat precursor pots containing water.
1.4.7.16 Never use glass precursor pots.
1.4.8
Materials
1.4.8.1
rine-containing materials may be used as O-rings (e.g. Viton™ materials),
ge
death.
.4.8.2
are
mposition takes place, producing
a highly acidic residue containing hydrofluoric acid (HF).
If there is any evidence that a Viton™ O-ring could have been subjected to temperatures
in exce
f 300°
9.911 (1985) and UFC 51 are recommended reading. Guidance is also contained in
‘The Safe Storage, Handling and Use of Liquid Gases in
BCGA/ECIF
If toxic, flammable or corrosive precursors are to be used, the entire system must be
situated in a purged or extracted environment with suitable gas detectors.
1
toxic, flammable or corrosive gases are used, extraction facilities must be connected to
this collar. Purge gas extracted from the precursor cabinet should be monitored by a
suitable gas detector to give advance warning of any leakage.
Ensure that the purge gas extraction sy
1
necessary.
Make regular checks on the vacuum integrit
1
sudden leaks.
1.4.7.10 Ensure that the system is completely purged BEFORE maintenance is started and
suitably leak tested AFTER maintenance is completed.
1
As far as practicable, shut down precursor lines when not in use.
Pumps must always be operated in accordance with the ma
1
with Oxford Instruments Plasma Technology engineers' training courses.
Pumps, when fitted with
processing run and for a suitable period after a processing run has finished.
Where gas detectors are fitted, their responses should be verified eve
1
(refer to the manufacturer’s manuals).
Do not fit incompatible precurs
1
are already fitted, or that have
Materials used in the construction of the system are in a safe state when installed.
However, fluo
as electrical insulation or as electrical isolation block (e.g. Teflon ™ or other tfe or ptfe
material) or as lubricating grease or fluid (e.g. Fomblin™, Krytox™ or the NCI™ ran
from Leybold) If any of these materials are over-heated, hazardous materials are
created that can result in the loss of a limb or
1
Very great care must be taken to ensure that Perfluoro-elastomer (Viton™) O-rings
not exposed to high temperatures. If overheated, deco
ss o
C the following actions must be carried out:
Summary of Contents for OpAL
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