System Manual
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A single button automatic process run allows a complete process to be run automatically. The
run starts by pumping the system down, carrying out the process and then venting the
system. The automatic process run can be carried out by a user logged on at any access level,
e.g. Manager, User etc..
Before starting an automatic process run, the rotary vane/roots/dry pumps must be started. It
is suggested that once the system is powered up, the Manager logs on, starts the pumps and
then re-logs on for the User or Production Operator to carry out the automatic process run(s).
When the pumps have started and the User or Production Operator is logged on, carry out
the automatic process run using the following steps.
1)
Place the wafer to be processed on the table.
2)
Close the process chamber lid.
3)
In PC 2000, select the System menu and then the Recipe option. The Recipe page is
displayed.
4)
Load the required recipe.
5)
Select the
Run
button. The following sequence will be automatically carried out:
i)
The process chamber will start to evacuate.
ii)
When the process chamber reaches base pressure, the process will
commence.
iii)
When all of the process steps have completed, the process chamber will be
vented.
6)
When the vent sequence is completed, open the process chamber and remove the
wafer.
To process another wafer, repeat the above steps from Step 1). If running the same recipe,
Step 4 can be skipped otherwise load another recipe.
NOTES:
a)
You can pause the process at any time by selecting the
PAUSE
button. This will
cause the Step Time and the plasma power to stop with the current step time
indicated. Re-starting the process will cause the process to continue from the time it
was paused. If, during the pause period, you change any of the process parameters,
e.g. gas demand, pressure etc., you must press the
START
button for the changes
made to come into effect, this will cause the step timer to continue from the time it
was paused.
b)
You can stop the process at any time; the message ‘Process Complete’ will be
displayed, if required, you can then run the same or another process.
Operating Instructions
Printed: 06 November 2007 09:42
Page 5-21 of 60
Generic (OpAL Plasma) Issue 1: Oct. 07
Summary of Contents for OpAL
Page 14: ......
