System Manual
Oxford Instruments Plasma Technology
OIPT Systems
2.2.1
Mandatory Specifications for total loss cooling systems
CAUTION
If clear (i.e. transparent) tubing is exposed to sunlight, algal growth can develop,
which can restrict coolant flow.
It is MANDATORY that clear tubing is not used in any part of the cooling system. OIPT
recommends the use of either black or dark green tubing.
CAUTION
It is the customer's responsibility not to exceed a pressure of 5 bar, or other limit that
has been set for the system. Exceeding this safe pressure may cause irreparable
damage to system components.
If total loss cooling with municipal water (drinking quality water) is used in the system or
in the pumps, the water quality must meet the following specifications. Note that
increased maintenance will be required if this water is used directly in the system as well
as in the pumps.
The water must be kept warm enough to prevent condensation on chamber surfaces and
outside system components. This applies to those parts of the system inside the clean
room and those parts in a service area. Condensation can damage components such as
RF power supplies, ferrofluidic seals and automatch units. Any damage so caused cannot
be covered by the system warranty.
•
Pressure:
4 to 5 bar. Backpressure from the drain must be less than 1 bar.
•
Temperature: 10ºC to 25ºC
•
pH:
7 to 8
•
Oxygen: Greater than 4mg/litre
•
CO
2
and NH
3
: Less
than
10mg/litre
•
Chloride: Less
than
100mg/litre
•
Calcium
Carbonate:
Less than 75mg/litre
•
Filtration:
To 0.9 micron full flow, for example filter element Balston 200-
50-50 or 200-95-50.
Services Specifications
Printed: 6-Jan-10, 8:53
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Issue 21: January 10
Summary of Contents for OpAL
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