Oxford Instruments OpAL, System Manual

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System Manual
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The Automatch Unit is controlled by the PC 2000 software via the PLC.
Manual and automatic control is provided on the PC 2000 process page. Typical RF
GENERATOR and RF AUTOMATCH panels are shown in Fig 2 and brief descriptions of the
control facilities are given in the following sub-sections.
Fig 2: Typical RF generator and RF automatch panels
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RF POWER
indicator
Displays the ON/OFF status of the RF Generator (coloured purple for ON
and grey for OFF).
Forward Power
field
Enter the required forward power in Watts.
Readback fields Display the current forward power, reflected power and DC Bias values.
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CAPACITOR 1
fields
Enter the required position for variable AMU Capacitor 1. The position
can be set between 0%, minimum capacitance, and 100%, maximum
capacitance. The capacitor position read back is displayed.
CAPACITOR 2
fields
Enter the required position for variable AMU Capacitor 2. The position
can be set between 0%, minimum capacitance, and 100%, maximum
capacitance. The capacitor position read back is displayed.
AUTO button Select to enable the AMU to tune automatically when the RF generator
is switched on. When the RF generator is switched off, the capacitors
return to the park position. When selected, the button’s indicator is
coloured yellow.
MANUAL button Select to enable the AMU to move the capacitors to the values defined in
the CAPACITOR 1 and CAPACITOR 2 fields; the capacitors will remain in
these positions. When selected, the button’s indicator is coloured yellow.
HOLD button Select to enable the AMU to tune automatically when the RF generator
is switched on. When the RF generator is switched off, the capacitors
remain at the last position. When selected, the button’s indicator is
coloured yellow.
OIPT Automatch Unit
Printed: 16-Nov-07, 9:26
Page 5 of 20 Issue 6: September 05