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System Manual
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Refer to Symptom (F) in the Fault diagnosis chart (sub-section 5.1, page 14).
If the coupling between the motor shafts and capacitor spindles, has become disengaged or
loose, use the following procedure to align the shafts/spindles to their correct relative
positions.
1)
Tighten the shaft and spindle grub screws.
2)
Loosen the two bolts securing the motor/gear assembly to the AMU casing.
3)
Carefully slide the motor/gear assembly away from the fan housing to disengage the
gear wheels from the capacitor.
4)
Align the gear wheels to the capacitor depending on the AMU version as follows:
a)
Air spaced capacitor
AMUs
(i)
Set the relevant capacitor to MANUAL mode.
(ii) Set the relevant capacitor to MAX, so that the motor drives
the read-back potentiometer to its upper limit, without
driving the capacitor itself.
(iii) Fully mesh the capacitor vanes.
b)
Vacuum capacitor
AMUs for RIE/PECVD
applications
(i)
Set the relevant capacitor to MANUAL mode.
(ii)
Set the relevant capacitor to MAX, so that the motor
drives the read-back potentiometer to its upper limit,
without driving the capacitor itself.
(iii)
Set the relevant capacitor to maximum by rotating its
shaft anti-clockwise until the shaft becomes loose and
starts to unscrew from the capacitor body, then rotate
the shaft one turn clockwise.
c)
Vacuum capacitor
AMUs for the ICP 180
application
For C1, use the procedure in b) above.
For C2, use the following steps:
(i)
Set C2 to MANUAL mode.
(ii)
Set the C2 to MIN so that the motor drives the read-
back potentiometer to its lower limit, without driving
the capacitor itself.
(iii)
Set C2 to minimum by rotating its shaft clockwise until
the physical end stop is reached, and then rotate the
shaft one turn anti-clockwise.
d)
Vacuum capacitor
AMUs for RF ion
source applications
For C1 and C2 alignment in this AMU, use the procedure for C2
in c) above.
5)
On completion of capacitor alignment in Step 4), re-engage the motor/gear assembly
to the capacitor and tighten the securing bolts.
6)
Check capacitor travel.
OIPT Automatch Unit
Issue 6: September 05
Page 16 of 20
Printed: 16-Nov-07, 9:26
Summary of Contents for OpAL
Page 14: ......
