Oxford Instruments OpAL, System Manual

Page: 307 / 342

System Manual
lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== ^ää=lfmq=póëíÉãë
PKP mêçÅÉÇìêÉ=
WARNING
HAZARDOUS RF VOLTAGE - CONTACT CAN CAUSE DEATH, SEVERE INJURY
OR BURNS.
ENSURE THAT THE RF SUPPLY IS SWITCHED OFF WHILE CARRYING OUT
STEPS 1 TO 8.
1) Connect the AMU to the system. Make a good earth bond between the vacuum
chamber and the AMU chassis.
2) Connect the output strap to the plasma electrode with at least a 25 mm wide copper
strap, with at least 10 mm clearance between the live strap and any earthed part.
3) Confirm the polarity and voltage of the dc power source before connecting to the
Sense and Control PCB:
JP7 pin 1 +24 Vdc
JP7 pin 2 0 V
4) Ensure the ventilation fans are all pulling air out of the automatch case and check
the system cooling is turned on. For sense board cooling, check one fan is pulling air
out and one is pulling air in to the sense board section.
5)
Confirm the operation of each motor using the manual button (see sub-section
2.3.2). An increase in capacitor position should make the vanes overlap more. In the
case of a vacuum capacitor, an increase in position should turn the capacitor shaft
anti-clockwise, when looking at it from the motor end (see Fig 5). Check with a
capacitance meter in case of doubt.
If the motors do not turn in the correct direction check the plug in connector on the
board, refer to OIPT Work Instruction No. 39.
6a) Calibrate the motors and their respective positions as follows:
For gear driven capacitors:
Loosen screws retaining the motors to the AMU box,
but don’t remove completely and ensure the gears don’t mesh.
For direct drive capacitors:
Unscrew the motor plate attached to the side of the
AMU box and pull the coupling apart.
Then,
For Air Vane Capacitor AMU:
Keeping gears separated, overlap the vanes fully. Then, making sure that the gears
don’t mesh, drive both motors to maximum (999), using the AMU control panel.
For Vacuum Capacitor AMU (AMU board REV05 and earlier):
Set the capacitor positions and drive motors to their required position according to
the system type as shown in the following table:
OIPT Automatch Unit
Printed: 16-Nov-07, 9:26
Page 9 of 20 Issue 6: September 05