OpAL
Oxford Instruments Plasma Technology
System Manual
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
Fig 6-1: Schematic of precursor cabinet
6)
Place the valves in an ultrasonic bath filled with isopropyl alcohol so that the
valve ports are immersed but the valve actuators are not.
7)
Attach a supply of clean, regulated compressed air to each valve actuator to
open each valve.
8)
Ultrasonically clean the valves for one hour.
9)
Remove the valves from the bath and use a pipe cleaner ( or similar) to remove
any remaning precursor from the valve body.
10)
Bake the valves at 100°C for thirty minutes to remove all traces of isopropyl
alcohol.
11)
Refit the ALD valves to the system.
12)
Start the system up.
13)
Leak test the precursor lines and prepare them for use, as described in
Appendix PSP.
Maintenance
Issue 4: July 10
Page 6-10 of 16
Printed: 14-Jul-10, 8:14
Summary of Contents for OpAL
Page 14: ......
