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System Manual
System On button:
Switches the system power on.
System Off button:
Switches the system power off.
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The PC 2000 software provides the user interface for automatically controlling and
monitoring the system hardware. The software is a Microsoft Windows™ application, running
on a PC (i.e. the system controller).
The software provides the following facilities:
a)
Multi-level password protected logging on.
b)
Vacuum system control for pumping and venting the system.
c)
Service mode for individual control of system components
d)
Display of system interlock status.
e)
Display of system data, e.g. RF generator cumulative on time.
f)
System log.
g)
Recipe creation and editing.
h)
Manual process run.
i)
Automatic process run using recipes.
j)
System vacuum leak checks.
k)
Mass flow controller calibration.
l)
Data logging.
The facilities are presented to the operator as function-related screens selected via menus.
These screens and menus are introduced as the relevant operation procedures are described
in the following sub-sections. A reference guide of all screens is given in sub-section 5.10,
page 5-35.
Operating Instructions
Generic (OpAL Plasma) Issue 1: Oct. 07
Page 5-4 of 60
Printed: 06 November 2007 09:42
Summary of Contents for OpAL
Page 14: ......
