LSM 510
OPERATION IN EXPERT MODE
LSM 510 META
Display and Analysis of Images
Carl Zeiss
03/06
B 45-0021 e
4-315
4.13.24.7 Measurement Functions
The topography measurement functions are activated via the
Measure
button bar. The measurement
functions can be performed in the 2D or 3D display mode.
Automated convention in height statistics analysis:
Topo Filters
None, median,
<9x9
FFT High
FFT Low
>9x9
Data formats
P
rimary profile
R
oughness
W
aviness
2D profile
Pxx
Rxx
Wxx
n.a.
3D topography
PSxx
RSxx
SWxx
n.a.
The following measurement functions are available:
Diagram
button: Diagram display. The
Profile
,
z Histo
,
Curve of tp
and
Grad. Histo
diagram display modes can be activated via the
Diagram
button and deactivated via the
Off Diagram
button. By
activation of the
Diagram
button, an additional button bar is
displayed for the selection of the required diagram or for deactivation.
The labeling of the
Diagram
button changes depending on which
diagram display mode has been activated.
Roughness
button: Calculation of the roughness parameters.
Volume
button: Calculation of the volume parameters.
(1)
Profile measurement mode in 2D display
•
Select the required 2D display of the stack via the
2D
button.
•
Click on the
Diagram
button in the
Measure
button bar. Click on the
Profile
button in the button
bar displayed afterwards.
−
The
Table
and
Profile
button bars are displayed below the
Measure
button bar.
−
A colored arrow (intersection line of the profile) is displayed in the image and the profile diagram
appears below the image.
•
If required, match the size of the
Image Display
window in order to obtain the complete display of
the profile diagram.
Содержание LSM 510
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