Strasbaugh 6DS-SP, Руководство по эксплуатации

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Strasbaugh Introduction
Version 4.0 - February 1998; Update 10/19/01
1 - 9
ABOUT THE MODEL 6DS-SP
PLANARIZER
The Model 6DS-SP Planarizer is designed specifically for chemical and
mechanical planarization polishing of semiconductor wafers to produce
uniformly flat surfaces. To achieve this goal Strasbaugh engineers have
incorporated a number of enhancements over previous polishers built by
Strasbaugh and by its competitors. Design emphasis has focused on
maximizing potential polishing results while incorporating versatility,
reliability, and simplicity of operation.
The 6DS-SP is built of special materials with optimum flatness and stable
thermal characteristics. In addition to superior mechanical design, the
Planarizer utilizes efficient, reliable computer and coprocessor systems for
machine and process control functions. The combined benefits of state-of-
the-art mechanical tolerances and machine controls provide the superior
process yield potential inherent in the Model 6DS-SP Planarizer.
A BASIC MACHINE WITH OPTIONAL FEATURES
The 6DS-SP is a basic machine with optional features available to permit the
production of a specialized planarizer best adapted to meet the needs of the
individual customer. The 6DS-SP Operations and Maintenance manuals
address the basic machine and the optional features available at time of
publication.
Please maintain a list of optional features installed and retrofit changes made
on your machine to facilitate support.