Strasbaugh 6DS-SP, Руководство по эксплуатации

Страница: 137 / 1562

Strasbaugh Operator Functions
Version 4.0 - February 1998 3 - 29
Function Key Choices Available at the Auto Polish Cycle Menu
Key Label Function(s)
Finish
Cycle
"Finish Cycle" causes the machine to stop after the current cycle.
This choice can be toggled on and off. (Auto mode only.)
Next
Step "Next Step" Immediately ends the current polish step and starts the
next. If there are no more steps, polishing will end.
Cond
Pad "Condition Pad" causes a pad conditioning cycle according to the
sweep and pad conditioning parameters.
Park
Cond
"Park Conditioner Arm" causes the conditioning arm to move to its
park position. (Used after aborting a pad conditioning cycle.)
Wet
Idle "Wet Idle" causes the machine to go into the wet idle state.
All
Wfrs "All Wafers" sets the machine to polish wafers indefinitely. ALL
will show in the Wafers display area.
No. of
Wafers "Number of Wafers" permits entry of a finite number of wafers to
polish before automatically going to a "Finish Cycle" state when
polishing the last wafers. The
Wfrs display area will show the
number of wafers remaining to be polished. When completed, the
display will return to the
ALL setting.
Load
Carrs "Load Carriers" causes carriers to be loaded onto the spindles
according to the active spindles set in the Machine Parameters
Menu.
Unload
Carrs "Unload Carriers" causes any carriers found on the spindles to be
unloaded.
Start
W/Load "Start With Load" (Auto mode only) starts an automatic cycle as if
wafers had just been placed on the load stations prior to being
loaded onto the spindles for polishing. Subsequent operation will be
fully automatic. This is useful for error recovery. This choice can
be toggled on and off.
Start
W/Unload "Start With Unload" (Auto mode only) starts an automatic cycle as
if wafers had just been unloaded from the spindles onto the load
stations. Subsequent operation will be automatic. This is useful for
error recovery. This choice can be toggled on and off.