STRASBAUGH, INC.
June 30, 2001
6DS-SP Software Ver 4.37.2
Page 7
Strasbaugh Confidential Information
NOTE: When first installing this or any later software version:
If the machine is either a "side-to-side" or "front-to-back" high throughput configuration
and calibration variables 243-245 are found to be zero, the software will automatically
load them from the old variables and a red notification screen will show.
If the machine is the AGV configuration and calibration variables 246-247 are found to be
zero, the software will automatically load them from the old variables and a red
notification screen will show.
If the machine is neither an AGV nor high throughput configuration, none of these
variables apply.
The automatic transfer of values from old variables to uninitialized new variables ensures
the machine will behave exactly as it did before upgrading software.
SPECIAL NOTE: If you upgrade from a previous version, the older variables 88 and 89 are
no longer used. However, they will still remain in the Calibration/Configuration disk file
CALVARS.DAT. If you load a version older than 4.37, that older version will use the older
variables and not the new ones. This can change the behavior of the machine because variable
89 will once again be used for both left and right throughput up/dn bottom positions. Also,
the older variables won't reflect any subsequent calibration changes in the new variables for
both high throughput and AGV configurations.
Содержание 6DS-SP
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Страница 4: ...Copyright 1998 by Strasbaugh All rights reserved Document prepared by Technical Publications Group...
Страница 19: ...Introduction INTRODUCTION...
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Страница 59: ...Introduction ACHINE ESCRIPTION...
Страница 108: ...Introduction PERATOR UNCTIONS...
Страница 131: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 23 Figure 3 4 Menu Selection...
Страница 134: ...Operations Model 6DS SP Planarizer 3 26 Version 4 0 February 1998 Figure 3 5 Home Machine Menu...
Страница 145: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 37 Figure 3 8 Recipe Management Menu...
Страница 150: ...Operations Model 6DS SP Planarizer 3 42 Version 4 0 February 1998 Figure 3 9 Home Machine Menu...
Страница 153: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 45 Figure 3 10 Auto Polish Cycle Menu...
Страница 166: ...Operations Model 6DS SP Planarizer 3 58 Version 4 0 February 1998 Figure 3 11 Slurry Flush Menu...
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Страница 203: ...Introduction ACHINE ETUP...
Страница 210: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 7 Figure 4 2 Slurry Flush Menu...
Страница 213: ...Operations Model 6DS SP Planarizer 4 10 Version 4 0 February 1998 Figure 4 3 Recipe Management Menu...
Страница 216: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 13 Figure 4 4 Polish Parameters Menu...
Страница 223: ...Operations Model 6DS SP Planarizer 4 20 Version 4 0 February 1998 Figure 4 5 Sweep Parameters Menu...
Страница 236: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 33 Figure 4 8 Machine Parameters Menu Screen Page 1...
Страница 239: ...Operations Model 6DS SP Planarizer 4 36 Version 4 0 February 1998 Figure 4 9 Machine Parameters Menu Screen Page 2...
Страница 242: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 39 Figure 4 10 Machine Parameters Menu Screen Page 3...
Страница 247: ...Operations Model 6DS SP Planarizer 4 44 Version 4 0 February 1998 Figure 4 11 Alarm Parameters Menu...
Страница 251: ...Operations Model 6DS SP Planarizer 4 48 Version 4 0 February 1998 Figure 4 12 Machine Setup Menu...
Страница 254: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 51 Figure 4 13 Password Menu...
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Страница 258: ...Introduction TROUBLESHOOTING...
Страница 267: ...Strasbaugh Troubleshooting Version 4 0 February 1998 5 9 Figure 13 1 Alarm Log Menu...
Страница 326: ...Introduction APPENDICES...
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Страница 329: ...Introduction LECTRIAL NPUT UTPUT...
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Страница 335: ...Copyright 1998 by Strasbaugh All rights reserved Document prepared by Technical Publications Group...
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Страница 356: ...Introduction REVISIONS...
Страница 357: ...Introduction INTRODUCTION...
Страница 395: ...Maintenance Model 6DS SP Planarizer 1 38 U Version 4 0 February 1998 Update 10 19 01 GUARANTEE WARRANTY CERTIFICATE...
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Страница 407: ...Strasbaugh Installation Version 4 0 February 1998 Update 11 06 01 2 11 U...
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Страница 421: ...Introduction HYSICAL ESCRIPTION...
Страница 444: ...Introduction ECHANICAL ESCRIPTION...
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Страница 463: ...Introduction CONTROL SYSTEM DESCRIPTION...
Страница 470: ...Introduction OWER ISTRIBUTION...
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Страница 479: ...Introduction LUMBING ESCRIPTION...
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Страница 490: ...Introduction REVENTATIVE AINTENANCE CHEDULES...
Страница 507: ...Introduction ECHANICAL AINTENANCE ROCEDURES...
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Страница 520: ...Maintenance Model 6DS SP Planarizer 9 12 Version 4 0 February 1998 Figure 9 7 Retainer Clamp Ring...
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Страница 691: ...Introduction OFTWARE ALIBRATION ROCEDURES...
Страница 703: ...Maintenance Model 6DS SP Planarizer 10 12 Version 4 0 February 1998 Figure 10 2 Manual Control Menu Screen Page 1...
Страница 707: ...Maintenance Model 6DS SP Planarizer 10 16 Version 4 0 February 1998 Figure 10 3 Manual Control Menu Screen Page 2...
Страница 710: ...Strasbaugh Software Calibration Procedures Version 4 0 February 1998 10 19 Figure 10 4 Manual Control Menu Screen Page 3...
Страница 713: ...Maintenance Model 6DS SP Planarizer 10 22 Version 4 0 February 1998 Figure 10 5 Diagnostics Menu...
Страница 716: ...Strasbaugh Software Calibration Procedures Version 4 0 February 1998 10 25 Figure 10 6 Calibration Configuration Menu...
Страница 862: ...Introduction NEUMATIC DJUSTMENTS...
Страница 897: ...Introduction OFTWARE ONTROL OMPUTER AINTENANCE...
Страница 912: ...Introduction TROUBLESHOOTING...
Страница 921: ...Strasbaugh Troubleshooting Version 4 0 February 1998 13 9 Figure 13 1 Alarm Log Menu...
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Страница 984: ...Copyright 1998 by Strasbaugh All rights reserved Document prepared by Technical Publications Group...
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Страница 1005: ...Introduction APPENDICES...
Страница 1006: ...Introduction ALIBRATION ARIABLES IST...
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Страница 1071: ...STRASBAUGH INC 6DS SP User Interface Reference May 31 2001 Ver 4 37 This page intentionally left blank...
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Страница 1467: ...Introduction SSEMBLY RAWINGS...
Страница 1468: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix B Engineering Drawings bound under separate cover Customer Parts Lists...
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Страница 1470: ...Introduction ARTS IST...
Страница 1471: ...Introduction LECTRICAL NPUT UTPUT...
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Страница 1474: ...Introduction PTIONS...
Страница 1476: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix D Options...
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Страница 1478: ...Introduction AINTENANCE OG HEETS...
Страница 1479: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix E Maintenance Log Sheets...
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Страница 1508: ...Introduction APPENDICES...
Страница 1509: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Manufacturer Data Attached CD...
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Страница 1534: ...Introduction APPENDICES...
Страница 1535: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Part 2 Manufacturers Data Sheets...
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Страница 1560: ...Introduction APPENDICES...
Страница 1561: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Part 3 Manufacturers Data Sheets Go to Manufacturer Data...
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