Strasbaugh 6DS-SP, Руководство по эксплуатации

Страница: 1280 / 1562

STRASBAUGH, INC.
October 4, 1999 6DS-SP Software Ver 4.31 Page 11
Strasbaugh Confidential Information
Carrier X General Information for Technicians:
Counters 59 and 60 control analog outputs to produce pressure for piston plate extension.
These counters are held to "410" which is a nominal 2 psi unless in the diagnostics mode.
In the diagnostic mode, the counters can be changed for testing and calibrating. When
leaving the diagnostics mode, they will automatically again be held at the value "410".
For wafer blowoff, the cycle will first put 500 counts into the membrane pressure control
counters 55 and 56 (left and right as required) for one second. This causes pressure to
quickly build from vacuum to a value that is still below atmosphere but close to it. Then
the pressure is increased under closed loop control for the time and pressure entered in
calibration variables 169 and 170.
If water flush valves are present (used with backpressure for other carrier designs), it is
best to disconnect them and change the plumbing so there is no chance that water can be
injected into membrane pressure system.
Caution: Changing membrane pressure from a positive value to atmosphere may leave the
membrane somewhat extended for a period and can interfere with the robot end effector.
Changing from membrane vacuum to atmosphere should not leave the membrane
extended. Therefore, you can briefly apply vacuum and release it to make sure the
membrane is not extended.
Cuation: If you enable membrane pressure with outputs 8 and 10 in the Diagnostics
menu, pressure or vacuum will be applied by whatever values are currently in counters 55
and 56. If they are a value that will cause pressure (which is very likely) the membranes
will bulge out. Many places in the software set these counters to the default value of 819
counts which is close to atmosphere, but usually positive. Therefore, set counters 55 and
56 first. Always be aware of the membrane pressure.
NOTE: A recipe (especially a previously existing recipe) can have a hidden setting, such
as spindle flushing, that is inappropriate for Carrier X. The software has been designed to
ignore these inappropriate choices. Still, it is a good idea to properly set all choices. A
hidden item can be made to show by temporarily setting Calibration Variable 205 to "0",
making the correction, and then setting 205 back to "1" and then re-saving the recipe.