Strasbaugh 6DS-SP, Руководство по эксплуатации

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STRASBAUGH, INC.
November 9, 2001 (Ver 4.38) 6DS-SP Calibration/Configuration Reference Page 51
216 Pad 2 change alarm(min,0-dsbl)
Configuration
Second table option
This causes an alarm to remind operators to change the secondary
table pad.
Enter a value in minutes to enable the alarm feature.
Enter "0" to disable.
If a value is entered, the primary pad time from the screen's life
status area is compared to the value. When actual time exceeds the
value, an alarm shows. The alarm is cleared when the "Pad 2" life
counter/timers are cleared with Alt-2.
217 L spndle down soft value
Calibration
All machines
Nominal value: 1300
Sets the pressure, expressed in control counter "counts" that will be
applied to the left spindle when moved down:
- onto a table before polishing.
- onto single table dedicated cleaning stations.
- for single table wafer unload if not F-B throughput.
- for cleaning at Hydro Lift load station if second table.
- for carrier unloading if not F-B throughput.
- for wet idle if single table and not F-B throughput
- from the Manual Control menu if appropriate.
This value is determined experimentally by entering values into
counter 12 in the Diagnostics Menu and observing the resulting
spindle force. Calibration must be over the primary polish table for
single table machines and over the second table for two table
machines. A small force, such as 20 lbs, is sufficient.
218 R spndle down soft value
Calibration
All machines
Nominal value: 1300
Same as variable 217 but for the right spindle using counter 13.