Strasbaugh 6DS-SP, Руководство по эксплуатации

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STRASBAUGH, INC.
Page 40 6DS-SP Calibration/Configuration Reference November 9, 2001 (Ver 4.38)
164 Scrubber present (0-no, 1-yes)
Configuration
All machines
Sets whether or not an optional scrubber station is installed.
(NOTE: Variable 140 must also be set to indicate whether the
scrubber is the "L" or "inline" configuration. If a scrubber is not
used, Variable 140 should be set to "0")
165 Scrub position tolerance (deg)
Configuration
Scrubber station option
Nominal value: 1 degree
Sets the position tolerance for determining if the scrubber is at the
load or unload position. For the load position, the scrubber flipper
must be at the position in variable 166 +/- the tolerance to be
considered at the position. Similarly, for the unload position, the
scrubber flipper must be at the position in variable 167 +/- the
tolerance.
166 Scrub actual load position (deg)
Calibration
Scrubber station option
Nominal value: 0 degrees
Sets the position, in degrees, from the scrubber station home
position to its load position. This value must match the actual
position observed in the Manual Control menu when the scrubber
flipper is resting against the load position hard stop. (The actual
calibration is performed by moving the hard stop.)
167 Scrub actual unload position (deg)
Calibration
Scrubber station option
Nominal value: 180 degrees
Sets the position, in degrees, from the scrubber station home
position to its unload position. This value must match the actual
position observed in the Manual Control menu when the scrubber
flipper is resting against the unload position hard stop. (The actual
calibration is performed by moving the hard stop.)
168
Scrub holding value (deg)
Configuration
Scrubber station option
Nominal value: 0.5 degree
Sets an additional distance the scrubber flipper will attempt to
move past either the load or unload hard stop. Since the flipper
can't move past the hard stop, it will be held gently against it. This
ensures that the flipper will be held reliably against the hard stop.
169 Wafer blowoff time (secs)
Configuration
All machines
Nominal value: 5 secs.
Sets the amount of time blowoff pressure will be applied to the
wafer backside during wafer unloading unless using Hydrolift load
stations or unloading onto a throughput unload stations. (This time
is ignored for Hydrolift or throughput unload stations.)
For Carrier X machines, the actual blowoff time will be 1 second
longer than entered due to 1 second of open loop blowoff that is
automatically performed before starting the closed loop controlled
blowoff.