Strasbaugh 6DS-SP, Руководство по эксплуатации

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STRASBAUGH, INC.
March 23, 2000 6DS-SP Software Ver 4.33 Page 9
Strasbaugh Confidential Information
Miscellaneous Improvements:
Version 4.33 adds the following miscellaneous improvements:
Made change to operation of alarm action feature so that actions would not be set unless
the machine is actually in an automatic cycle. Previously, an alarm during idle could
produce a result such as displaying "finish cycle" even though the machine is idle.
Made correction for two table configurations using only the primary table for polish to
correctly use the primary table "pressure minimums" (variables 32 and 42) after polishing
before the spindles are raised from the table. Previously, the secondary table "pressure
minimums (variables 37 and 47) had been used.
Made correction to the F-B automatic cycle when a new send cassette is installed while
"odd polish" is occurring. Previously, after loading the next two wafers to be polished on
the load stations, the cycle would attempt to unload wafers from both spindles even
though only the left was used for the "odd polish". The cycle will now correctly unload
from only the left spindle after odd polish at all times.
In GEM, made a correction to the Equipment Constant initialization routine. This
corrected a problem that could inhibit the 6DS-SP from automatically establishing
communication with the Host, and entering the Communication State "Communicating".