Strasbaugh 6DS-SP, Руководство по эксплуатации

Страница: 1167 / 1562

STRASBAUGH, INC.
November 9, 2001 6DS-SP Software Ver 4.38 Page 3
Strasbaugh Confidential Information
CE Compliance Related Changes:
New Calibration Variable:
Calibration Variable 251 “CE config present (0-no, 1-yes) must be set to match whether or
not the machine is CE equipped. Set to “1” if CE equipped. Set to “0” if not CE equipped.
Note: Some changes affect all machines even if not CE equipped (described further below).
Front Panel Reset Button:
If the machine is CE equipped, a “reset” button is next to the “start” button.
When the polish door is opened, major systems in the polish section are disabled. These
systems are the table/spindle/bridge/robot servo systems and the shuttle/spindle pneumatic
systems. After closing the polish doors, these systems remain disabled until reset with the
front panel reset button. While disabled, a reminder notice will show on the screen where the
life data normally shows.
The priority of information that can show in the life data area is shown below:
(CE related changes continued on next page)
NOTICE
Main polish section
systems are disabled.
After closing polish
doors, use reset button
on panel to re-enable.
Shows if the major polish section systems are disabled
(bright blue background). This is the highest priority
use of the life status area.
If major polish section systems are disabled AND a
Host message is waiting (GEM option only), the same
message described above shows wit h an added
notation at the bottom (red background for notation).
NOTICE
Main polish section
systems are disabled.
After closing polish
doors, use reset button
on panel to re-enable.
(Host message waiting)
MESSAGE FROM HOST
Press Alt-V to view.
Acknowledge message
in GEM menu to
clear this notice and
silence the buzzer
If a Host message is waiting and the polish section
systems are enabled, the standard “Message from
host” notation shows (GEM option only) (red
background).
------- AGV DATA -------
Last Wfr1 Wfr2
Line 0 0 0
Slot 0 0 0
Recipe 0 0 0
Cass 0 0 0
If none of the above is occurring and AGV data is
requested (AGV configuration only), the AGV data
shows (yellow background).
LIFE Wafers Time
1-Pad 1 0 0h 0m
2-Pad 2 0 0h 0m
3-L Carr 0 0h 0m
4-R-Carr 0 0h 0m
5-Primary cond 0h 0m
Lifetime 0 0h
If none of the above is occurring, then the life data
shows (light blue background). This is the lowest
priority use of the life data area and is typically what
shows most of the time.