Strasbaugh 6DS-SP, Руководство по эксплуатации

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Strasbaugh Preventive Maintenance Schedules
Version 4.0 - February 1998 8 - 13
Notes:
The Incoming Compressed Air Supply Filter and Regulation System
The incoming compressed air supply filter and regulation system requires
periodic inspection, with frequency depending on the quality of the air supply.
The filter element should be visually inspected for contamination and replaced
when inhibiting the air flow. A partially clogged filter will produce an excessive
pressure drop which could eventually affect machine operation. The coalescing
filter should be inspected for visible contamination and replaced if clogged with
visible debris or if air flow is restricted. The bowl is self draining, and some
fluid is usually visible. If the bowl is too full of fluid, and fluid is found in the
air lines, replace it.
The Drain Tubs for the Polish Table and Elevator
The drain tubs for the polish table and elevator should be frequently checked and
periodically cleaned out to prevent the drain hoses and piping from clogging.
Inspect the hoses for any blockages from debris. Check the polish table drain tub
for wafer chips and remove. Check that the pan rinse sprayers are working
properly.