Strasbaugh 6DS-SP, Руководство по эксплуатации

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STRASBAUGH, INC.
March 13, 1997 6DS-SP Software Ver 4.22 Page 4
Improved handling at end of polish if next wafers still being loaded:
If wafer loading is still occurring when the polishing cycle ends, the spindles will now
raise from the table and rotations will stop. If in-situ conditioning was used, it will end
and the arm will move to the outer position. The bridge will remain over the polishing
table until the wafer loading is complete. Then the bridge will move to the load station
(or first to the curtain rinse if using that option) and unloading will commence.
Improved handling of the "start with load" feature if throughput enabled:
To use this feature, wafers (or one wafer if using a single spindle) must be on the load
station but not on the unload station. If a wafer is found on an unload station, the cycle
will not start and the alarm "WFR FOUND ON THRUPUT UNLD, abort clears" will
show.
Improved handling of the "start with unload" feature if throughput enabled:
To use this feature, wafers must be on both the load and unload stations (or one wafer on
each station if a using single spindle). If wafers are not found on the load station, the
cycle will not start and the alarm "WAFER NOT SEATING AT LEFT LOAD" or
"WAFER NOT SEATING AT RIGHT LOAD" will show. If wafers are not found on the
unload station, the cycle not start and the alarm "WFR ABSENT ON THRUPUT UNLD,
abort clears" will show.
If a cycle is aborted before wafers are on the load stations, wafers can be manually placed
in the load station to use the feature. However, manually placing wafers on these stations
may result in improper "lot end" reporting.
Second Table Edge Rinsing:
Version 4.22 adds support for second table edge rinsing (Output 116 "TBL2 edge rinse").
The output will turn on (controlling a rinse valve) any time the table is rotating at least 1 rpm
for more than 5 seconds. The 5 second delay prevents nuisance edge rinsing during
maintenance such as pad changing or machine cleaning.
"Cleaning Disabled" Notation for Certain Machine Configurations: