Strasbaugh 6DS-SP, Руководство по эксплуатации

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STRASBAUGH, INC.
January 26, 1999 6DS-SP Software Ver 4.29.1 Page 8
Automatic “Finish Cycle” Actions:
There are still some times when the machine will automatically go into a “finish cycle”:
- If the “No. of Wafers” choice has been used
- If a scrubber failure occurred and variable 187 “Scrb err(0-rcv cass,1-fin cyc)” is
set to do a finish cycle upon a scrubber error.
- If the F-B HTP with four elevators is used in the match mode and one of the send
cassettes is not active.
Alarm Action Behavior:
Action is continually asserted if an alarm exists with a configured action. Therefore, if
the operator clears a halt or finish cycle and the alarm is still occurring, the action would
immediately be re-asserted by the alarm. Remember, an alarm may not display if a higher
priority alarm is showing although its action will still be asserted. If multiple action
alarms exist, the alarm with the most severe action will be displayed. (Note: Multiple
alarms are rare.)
If an alarm action aborts polishing, the step number and remaining step time will
automatically be placed in the abort log just as if the operator had aborted polishing.
Configuring Multiple Machines (for technicians):
If configuring multiple machines, especially for the first time, one machine can be
configured and its file “ALARMACT.DAT” copied to the other machines. This file
contains the actual alarm action choices. The file will be in the \QB45 directory.
File Backup (for technicians):
The configuration file ALARMACT.DAT should be backed up similar to the
CALVARS.DAT, CALVARS2.DAT, “INIT” files, and the recipe files. The
SBACKUP.BAT batch file will automatically copy ALARMACT.DAT along with all of
those other machine specific files. If you use anything other than SBACKUP, make sure
it backs up all machine specific files.