STRASBAUGH, INC.
May 30, 2000
6DS-SP Software Utility Programs Reference
Page 2
Strasbaugh Confidential Information
XportRec (Export Recipe) Utility Program:
XportRec exports a 6DS-SP recipe file from the 6DS-SP format to a CSV text file format
compatible w/ Microsoft Excel. (This program is the companion to MportRec which imports
6DS-SP CSV format files to recipe files with the 6DS-SP format.)
XportRec will:
•
Read a 6DS-SP binary recipe file.
•
Compare each recipe element against the limits established in RECLIMIT.DAT.
•
Notify the operator of any out of limit recipe element.
•
Prompt the operator to enter a new value if desired.
•
Save the modified recipe file (if new values were entered).
•
Save the recipe data, along with label and limit data, in an Excel import file (.CSV).
XportRec is 6DS-SP software version specific because recipe limit tests use data in the 6DS-
SP software file RECLIMIT.DAT. The initial XportRec release is compatible with 6DS-SP
software versions 4.33 and 4.34.
XportRec.Exe for 6DS-SP Version 4.33
Copyright 2000 by Strasbaugh, Inc.
Ver 1.0
This program exports a 6DS-SP recipe to a file format (.CSV) that can be read
by Microsoft Excel. The program scans the selected recipe file, and prompts the
operator to safely modify any out of limit variables(s). As needed, the program
will save a copy of the unmodified recipe with a .OLD extension.
To exit the program at any time press the Ctrl-C key combination.
Enter the recipe name:
Содержание 6DS-SP
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Страница 4: ...Copyright 1998 by Strasbaugh All rights reserved Document prepared by Technical Publications Group...
Страница 19: ...Introduction INTRODUCTION...
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Страница 59: ...Introduction ACHINE ESCRIPTION...
Страница 108: ...Introduction PERATOR UNCTIONS...
Страница 131: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 23 Figure 3 4 Menu Selection...
Страница 134: ...Operations Model 6DS SP Planarizer 3 26 Version 4 0 February 1998 Figure 3 5 Home Machine Menu...
Страница 145: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 37 Figure 3 8 Recipe Management Menu...
Страница 150: ...Operations Model 6DS SP Planarizer 3 42 Version 4 0 February 1998 Figure 3 9 Home Machine Menu...
Страница 153: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 45 Figure 3 10 Auto Polish Cycle Menu...
Страница 166: ...Operations Model 6DS SP Planarizer 3 58 Version 4 0 February 1998 Figure 3 11 Slurry Flush Menu...
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Страница 203: ...Introduction ACHINE ETUP...
Страница 210: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 7 Figure 4 2 Slurry Flush Menu...
Страница 213: ...Operations Model 6DS SP Planarizer 4 10 Version 4 0 February 1998 Figure 4 3 Recipe Management Menu...
Страница 216: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 13 Figure 4 4 Polish Parameters Menu...
Страница 223: ...Operations Model 6DS SP Planarizer 4 20 Version 4 0 February 1998 Figure 4 5 Sweep Parameters Menu...
Страница 236: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 33 Figure 4 8 Machine Parameters Menu Screen Page 1...
Страница 239: ...Operations Model 6DS SP Planarizer 4 36 Version 4 0 February 1998 Figure 4 9 Machine Parameters Menu Screen Page 2...
Страница 242: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 39 Figure 4 10 Machine Parameters Menu Screen Page 3...
Страница 247: ...Operations Model 6DS SP Planarizer 4 44 Version 4 0 February 1998 Figure 4 11 Alarm Parameters Menu...
Страница 251: ...Operations Model 6DS SP Planarizer 4 48 Version 4 0 February 1998 Figure 4 12 Machine Setup Menu...
Страница 254: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 51 Figure 4 13 Password Menu...
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Страница 258: ...Introduction TROUBLESHOOTING...
Страница 267: ...Strasbaugh Troubleshooting Version 4 0 February 1998 5 9 Figure 13 1 Alarm Log Menu...
Страница 326: ...Introduction APPENDICES...
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Страница 329: ...Introduction LECTRIAL NPUT UTPUT...
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Страница 335: ...Copyright 1998 by Strasbaugh All rights reserved Document prepared by Technical Publications Group...
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Страница 356: ...Introduction REVISIONS...
Страница 357: ...Introduction INTRODUCTION...
Страница 395: ...Maintenance Model 6DS SP Planarizer 1 38 U Version 4 0 February 1998 Update 10 19 01 GUARANTEE WARRANTY CERTIFICATE...
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Страница 407: ...Strasbaugh Installation Version 4 0 February 1998 Update 11 06 01 2 11 U...
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Страница 421: ...Introduction HYSICAL ESCRIPTION...
Страница 444: ...Introduction ECHANICAL ESCRIPTION...
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Страница 463: ...Introduction CONTROL SYSTEM DESCRIPTION...
Страница 470: ...Introduction OWER ISTRIBUTION...
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Страница 479: ...Introduction LUMBING ESCRIPTION...
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Страница 490: ...Introduction REVENTATIVE AINTENANCE CHEDULES...
Страница 507: ...Introduction ECHANICAL AINTENANCE ROCEDURES...
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Страница 520: ...Maintenance Model 6DS SP Planarizer 9 12 Version 4 0 February 1998 Figure 9 7 Retainer Clamp Ring...
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Страница 691: ...Introduction OFTWARE ALIBRATION ROCEDURES...
Страница 703: ...Maintenance Model 6DS SP Planarizer 10 12 Version 4 0 February 1998 Figure 10 2 Manual Control Menu Screen Page 1...
Страница 707: ...Maintenance Model 6DS SP Planarizer 10 16 Version 4 0 February 1998 Figure 10 3 Manual Control Menu Screen Page 2...
Страница 710: ...Strasbaugh Software Calibration Procedures Version 4 0 February 1998 10 19 Figure 10 4 Manual Control Menu Screen Page 3...
Страница 713: ...Maintenance Model 6DS SP Planarizer 10 22 Version 4 0 February 1998 Figure 10 5 Diagnostics Menu...
Страница 716: ...Strasbaugh Software Calibration Procedures Version 4 0 February 1998 10 25 Figure 10 6 Calibration Configuration Menu...
Страница 862: ...Introduction NEUMATIC DJUSTMENTS...
Страница 897: ...Introduction OFTWARE ONTROL OMPUTER AINTENANCE...
Страница 912: ...Introduction TROUBLESHOOTING...
Страница 921: ...Strasbaugh Troubleshooting Version 4 0 February 1998 13 9 Figure 13 1 Alarm Log Menu...
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Страница 1005: ...Introduction APPENDICES...
Страница 1006: ...Introduction ALIBRATION ARIABLES IST...
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Страница 1467: ...Introduction SSEMBLY RAWINGS...
Страница 1468: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix B Engineering Drawings bound under separate cover Customer Parts Lists...
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Страница 1470: ...Introduction ARTS IST...
Страница 1471: ...Introduction LECTRICAL NPUT UTPUT...
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Страница 1474: ...Introduction PTIONS...
Страница 1476: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix D Options...
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Страница 1478: ...Introduction AINTENANCE OG HEETS...
Страница 1479: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix E Maintenance Log Sheets...
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Страница 1508: ...Introduction APPENDICES...
Страница 1509: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Manufacturer Data Attached CD...
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Страница 1534: ...Introduction APPENDICES...
Страница 1535: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Part 2 Manufacturers Data Sheets...
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Страница 1560: ...Introduction APPENDICES...
Страница 1561: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Part 3 Manufacturers Data Sheets Go to Manufacturer Data...
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