Strasbaugh 6DS-SP, Руководство по эксплуатации

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STRASBAUGH, INC.
May 31, 2001 (Ver 4.37) 6DS-SP User Interface Reference Page 55
MACHINE SETUP MENU (cont.):
MENU ITEM DESCRIPTIONS:
Wafer source/Recipe source,
(in auto cycle) Cass/Oper or GEM
Cass/GEM Queue
AGV/Oper or GEM
AGV/GEM Queue
AGV/AGV Sender The wafer source selections are Cass or AGV
(if optional AGV interface is installed).
Cassette will cause wafers to be taken from the
send cassette. AGV intrfc will cause wafers to
be accepted from the AGV sender.
Depending on options, recipe selection is by
means of the
Oper or GEM , the GEM
Queue , or the AGV Sender .
Oper or GEM means the recipe will be
whatever was last selected by the operator or
by GEM. (AGV recipes are are ignored.)
GEM Queue permits GEM selection even
while in an auto cycle.
AGV Sender will cause recipes to be selected
by AGV interface data when using the "Auto"
cycle. Any previously selected recipe will be
superseded by the AGV recipe. If using the
scrubber transfer mode, the currently showing
recipe is used and AGV recipes will not be
selected regardless of this setting.
Lot/Recipe Integrity,
(If Rec = GEM Queue) Enable
Disable
This feature applies only if using GEM. This
feature permits processing each lot with a
different recipe. Lot/recipe integrity is
maintained even if lots have an odd number of
wafers. If a lot has an odd number, an "odd
wafer polish" cycle will finish that lot before
starting the next one with a different recipe.
Also a lot is defined as a single cassette for this
feature.
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