Operations Model
6DS-SP Planarizer
1 - 20
Version 4.0 - February 1998; Update 10/19/01
MODEL 6DS-SP INTERLOCK SYSTEM
There are six coded magnetic switch devices connected to the EMO safety
relay. These magnetic switches are located on the four lower access panels,
and on each door of the large electrical cabinet. Each magnetic switch
device consists of one "sensor" and one magnetic "actuator". Each sensor
contains one set of normally open (NO) contacts and one set of normally
closed (NC) contacts. The sensor must be used with a matching magnetic
actuator in order to function. These matched sets drastically reduce the
ability to defeat the sensor by a simple magnet.
The coded magnetic switches are designed to function only with a safety
relay. The safety relay monitors both the NO and NC contacts of the
magnetic switches. Whenever one of the four lower access panels, or one of
the two large electrical cabinet doors, is not in place, the safety relay opens
the output contacts. This disconnects power to the coil of the main contactor
and thus disconnects power to the main part of the machine.
A control unit monitors the status of the main contactor. The main contactor
is a safety contactor designed with "mechanically linked, positively guided
contacts". One of the normally-closed auxiliary contacts is connected to the
monitoring circuit of the control unit. The control unit will not close the
safety output contacts unless all the magnetic switches are correctly situated
and the NC contacts of the main contactor are closed. This style of contactor
ensures that, in the case of welded main contacts, the machine cannot be
powered on until the welded-contact condition is corrected.
The power required to ensure function of this circuit is fed by a 24VAC
circuit, which is not affected by an emergency power-off condition.
Содержание 6DS-SP
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Страница 4: ...Copyright 1998 by Strasbaugh All rights reserved Document prepared by Technical Publications Group...
Страница 19: ...Introduction INTRODUCTION...
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Страница 59: ...Introduction ACHINE ESCRIPTION...
Страница 108: ...Introduction PERATOR UNCTIONS...
Страница 131: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 23 Figure 3 4 Menu Selection...
Страница 134: ...Operations Model 6DS SP Planarizer 3 26 Version 4 0 February 1998 Figure 3 5 Home Machine Menu...
Страница 145: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 37 Figure 3 8 Recipe Management Menu...
Страница 150: ...Operations Model 6DS SP Planarizer 3 42 Version 4 0 February 1998 Figure 3 9 Home Machine Menu...
Страница 153: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 45 Figure 3 10 Auto Polish Cycle Menu...
Страница 166: ...Operations Model 6DS SP Planarizer 3 58 Version 4 0 February 1998 Figure 3 11 Slurry Flush Menu...
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Страница 203: ...Introduction ACHINE ETUP...
Страница 210: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 7 Figure 4 2 Slurry Flush Menu...
Страница 213: ...Operations Model 6DS SP Planarizer 4 10 Version 4 0 February 1998 Figure 4 3 Recipe Management Menu...
Страница 216: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 13 Figure 4 4 Polish Parameters Menu...
Страница 223: ...Operations Model 6DS SP Planarizer 4 20 Version 4 0 February 1998 Figure 4 5 Sweep Parameters Menu...
Страница 236: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 33 Figure 4 8 Machine Parameters Menu Screen Page 1...
Страница 239: ...Operations Model 6DS SP Planarizer 4 36 Version 4 0 February 1998 Figure 4 9 Machine Parameters Menu Screen Page 2...
Страница 242: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 39 Figure 4 10 Machine Parameters Menu Screen Page 3...
Страница 247: ...Operations Model 6DS SP Planarizer 4 44 Version 4 0 February 1998 Figure 4 11 Alarm Parameters Menu...
Страница 251: ...Operations Model 6DS SP Planarizer 4 48 Version 4 0 February 1998 Figure 4 12 Machine Setup Menu...
Страница 254: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 51 Figure 4 13 Password Menu...
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Страница 258: ...Introduction TROUBLESHOOTING...
Страница 267: ...Strasbaugh Troubleshooting Version 4 0 February 1998 5 9 Figure 13 1 Alarm Log Menu...
Страница 326: ...Introduction APPENDICES...
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Страница 329: ...Introduction LECTRIAL NPUT UTPUT...
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Страница 335: ...Copyright 1998 by Strasbaugh All rights reserved Document prepared by Technical Publications Group...
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Страница 356: ...Introduction REVISIONS...
Страница 357: ...Introduction INTRODUCTION...
Страница 395: ...Maintenance Model 6DS SP Planarizer 1 38 U Version 4 0 February 1998 Update 10 19 01 GUARANTEE WARRANTY CERTIFICATE...
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Страница 421: ...Introduction HYSICAL ESCRIPTION...
Страница 444: ...Introduction ECHANICAL ESCRIPTION...
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Страница 463: ...Introduction CONTROL SYSTEM DESCRIPTION...
Страница 470: ...Introduction OWER ISTRIBUTION...
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Страница 479: ...Introduction LUMBING ESCRIPTION...
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Страница 490: ...Introduction REVENTATIVE AINTENANCE CHEDULES...
Страница 507: ...Introduction ECHANICAL AINTENANCE ROCEDURES...
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Страница 520: ...Maintenance Model 6DS SP Planarizer 9 12 Version 4 0 February 1998 Figure 9 7 Retainer Clamp Ring...
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Страница 691: ...Introduction OFTWARE ALIBRATION ROCEDURES...
Страница 703: ...Maintenance Model 6DS SP Planarizer 10 12 Version 4 0 February 1998 Figure 10 2 Manual Control Menu Screen Page 1...
Страница 707: ...Maintenance Model 6DS SP Planarizer 10 16 Version 4 0 February 1998 Figure 10 3 Manual Control Menu Screen Page 2...
Страница 710: ...Strasbaugh Software Calibration Procedures Version 4 0 February 1998 10 19 Figure 10 4 Manual Control Menu Screen Page 3...
Страница 713: ...Maintenance Model 6DS SP Planarizer 10 22 Version 4 0 February 1998 Figure 10 5 Diagnostics Menu...
Страница 716: ...Strasbaugh Software Calibration Procedures Version 4 0 February 1998 10 25 Figure 10 6 Calibration Configuration Menu...
Страница 862: ...Introduction NEUMATIC DJUSTMENTS...
Страница 897: ...Introduction OFTWARE ONTROL OMPUTER AINTENANCE...
Страница 912: ...Introduction TROUBLESHOOTING...
Страница 921: ...Strasbaugh Troubleshooting Version 4 0 February 1998 13 9 Figure 13 1 Alarm Log Menu...
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Страница 1005: ...Introduction APPENDICES...
Страница 1006: ...Introduction ALIBRATION ARIABLES IST...
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Страница 1071: ...STRASBAUGH INC 6DS SP User Interface Reference May 31 2001 Ver 4 37 This page intentionally left blank...
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Страница 1467: ...Introduction SSEMBLY RAWINGS...
Страница 1468: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix B Engineering Drawings bound under separate cover Customer Parts Lists...
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Страница 1470: ...Introduction ARTS IST...
Страница 1471: ...Introduction LECTRICAL NPUT UTPUT...
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Страница 1474: ...Introduction PTIONS...
Страница 1476: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix D Options...
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Страница 1478: ...Introduction AINTENANCE OG HEETS...
Страница 1479: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix E Maintenance Log Sheets...
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Страница 1508: ...Introduction APPENDICES...
Страница 1509: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Manufacturer Data Attached CD...
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Страница 1534: ...Introduction APPENDICES...
Страница 1535: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Part 2 Manufacturers Data Sheets...
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Страница 1560: ...Introduction APPENDICES...
Страница 1561: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Part 3 Manufacturers Data Sheets Go to Manufacturer Data...
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