Strasbaugh 6DS-SP, Руководство по эксплуатации

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STRASBAUGH, INC.
November 9, 2001 6DS-SP Software Ver 4.38 Page 5
Strasbaugh Confidential Information
Halt used for more cycles than only the automatic polish cycle:
All machines: A “halt” will now occur if a polish door is opened during various automatic
cycles (polishing, carrier loading, carrier unloading, demand wafer unloading, or the first part
of the wet idle sequence). After closing the door, pressing the start button will resume the
cycle.
CE equipped machines: If CE hardware is installed, the “reset” button must be pressed before
the start button.
Bridge and Robot Movement:
All machines: If a polish door is opened during an automatic cycle (polishing, carrier loading,
carrier unloading, the demand wafer unload cycle, or the first part of the wet idle sequence) a
pending bridge or robot servo move will no longer continue when the door is re-closed as in
previous versions. Instead, the pending bridge or robot move will continue when the “start”
button is pressed to remove the halt.
CE equipped machines: If CE hardware is installed, the “reset” button must be pressed before
the start button.
Different behaviors when opening polish door:
All machines: If a polish door is opened during wet idling, the wet idle will end.
CE equipped machines: If a front/rear type shuttle is moving and a polish door is opened, the
shuttle will pause in mid-position until the door is closed
CE equipped machines: If a polish door is opened, it will not be possible to command the
spindles to lower. Also the spindles will still raise after a short delay if polishing, but will still
not raise if lowered in a maintenance mode. Also, the “reset” button must be pressed to re-
enable the polish section.
New Cycle Start Alarm:
CE equipped machines only: If the polish section is disabled (whether the polish door is open
or closed) and there is an attempt to start any of the main automatic cycles (polish, scrubber
transfer, or Nova transfer), alarm #48 will occur.
“POLISH SECTION DISABLED” is how it will show on the screen.
“POLISH SECTION DISABLED (at start)” is how it will be logged.
This alarm will not show at any other time.
(CE related changes continued on next page)