Strasbaugh 6DS-SP, Руководство по эксплуатации

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Maintenance Model 6DS-SP Planarizer
9 - 88 Version 4.0 - February 1998
B. CHECK CURRENT CALIBRATION
Note: The carriers will fit so smoothly into the load station rings that the ring
will become a part of the spindle and carrier; the load station “bucket”,
however, can be moved independently.
1. At Page 1 of the Manual Control Menu select Robot Move and choose
Left Send to move the robot out of the way.
2. Select Bridge Move and choose Load to move the bridge to its load
position.
3. At Page 2 of the Manual Control Menu select Left Spindle Up/Down
and choose Down to lower the left spindle.
4. Select Right Spindle Up/Down and choose Down to lower the right
spindle.
5. Open the Left Front Operator Door.
6. Hold a straight edge vertically against the intersection of the left carrier
and load ring edges.
7. Look for light between the carrier or load ring and the straight edge.
8. For each load station, using a precision scale, measure the light gap
between the carrier and load ring and record:
a. At the left and right sides of each load station.
b. At the front and back of each load station.
c. For each load station, record each gap and its direction.
GOAL: There should be a .125 in. (1/8 in.) gap between the
load ring and bucket at the left, right, front, and rear.
d. If the goal is met, no adjustment is needed. Skip to the When A
Satisfactory Adjustment Is Achieved, below.
e. If the goal is not met, make the adjustment as detailed in the
Alignment Procedure section below.