Strasbaugh
Mechanical Maintenance Procedures
Version 4.0 - February 1998
9 - 69
B.
CHECK CURRENT CALIBRATION
1.
Place a cassette on the left send elevator.
2.
Lower the cassette sensor arm.
3.
At the Diagnostics Menu, select View Inputs and Next Page to display
the cassette sensor input status for the left send elevator (Input
37
).
4.
Read the status of Input 37.
GOAL:
When the cassette sensor arm is down, Input 37 should
display ON.
(right send elevator
=
Input 38)
(left receive elevator
=
Input 39)
(right receive elevator
=
Input 40)
a.
If the input is
on
, skip to When Satisfactory Adjustment Is
Achieved, below.
b.
If the input is
off,
correct it by following the adjustment procedure
in Section C., immediately below.
C.
ADJUSTMENT PROCEDURE
1.
Lift the sensor arm.
2.
Locate the micro switch mounted at the end of the cassette sensor arm.
3.
Loosen the two mounting screws:
a.
While holding one screw firmly with a flat blade screwdriver, use a
small adjustable wrench to rotate its nut
counterclockwise
.
b.
Repeat for the other mounting screw.
4.
Manually reposition the switch slightly.
5.
Retighten each nut by rotating it
clockwise
while holding its screw with
the screwdriver.
6.
Lower the arm to test.
Содержание 6DS-SP
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Страница 4: ...Copyright 1998 by Strasbaugh All rights reserved Document prepared by Technical Publications Group...
Страница 19: ...Introduction INTRODUCTION...
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Страница 59: ...Introduction ACHINE ESCRIPTION...
Страница 108: ...Introduction PERATOR UNCTIONS...
Страница 131: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 23 Figure 3 4 Menu Selection...
Страница 134: ...Operations Model 6DS SP Planarizer 3 26 Version 4 0 February 1998 Figure 3 5 Home Machine Menu...
Страница 145: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 37 Figure 3 8 Recipe Management Menu...
Страница 150: ...Operations Model 6DS SP Planarizer 3 42 Version 4 0 February 1998 Figure 3 9 Home Machine Menu...
Страница 153: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 45 Figure 3 10 Auto Polish Cycle Menu...
Страница 166: ...Operations Model 6DS SP Planarizer 3 58 Version 4 0 February 1998 Figure 3 11 Slurry Flush Menu...
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Страница 203: ...Introduction ACHINE ETUP...
Страница 210: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 7 Figure 4 2 Slurry Flush Menu...
Страница 213: ...Operations Model 6DS SP Planarizer 4 10 Version 4 0 February 1998 Figure 4 3 Recipe Management Menu...
Страница 216: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 13 Figure 4 4 Polish Parameters Menu...
Страница 223: ...Operations Model 6DS SP Planarizer 4 20 Version 4 0 February 1998 Figure 4 5 Sweep Parameters Menu...
Страница 236: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 33 Figure 4 8 Machine Parameters Menu Screen Page 1...
Страница 239: ...Operations Model 6DS SP Planarizer 4 36 Version 4 0 February 1998 Figure 4 9 Machine Parameters Menu Screen Page 2...
Страница 242: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 39 Figure 4 10 Machine Parameters Menu Screen Page 3...
Страница 247: ...Operations Model 6DS SP Planarizer 4 44 Version 4 0 February 1998 Figure 4 11 Alarm Parameters Menu...
Страница 251: ...Operations Model 6DS SP Planarizer 4 48 Version 4 0 February 1998 Figure 4 12 Machine Setup Menu...
Страница 254: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 51 Figure 4 13 Password Menu...
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Страница 258: ...Introduction TROUBLESHOOTING...
Страница 267: ...Strasbaugh Troubleshooting Version 4 0 February 1998 5 9 Figure 13 1 Alarm Log Menu...
Страница 326: ...Introduction APPENDICES...
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Страница 329: ...Introduction LECTRIAL NPUT UTPUT...
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Страница 356: ...Introduction REVISIONS...
Страница 357: ...Introduction INTRODUCTION...
Страница 395: ...Maintenance Model 6DS SP Planarizer 1 38 U Version 4 0 February 1998 Update 10 19 01 GUARANTEE WARRANTY CERTIFICATE...
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Страница 421: ...Introduction HYSICAL ESCRIPTION...
Страница 444: ...Introduction ECHANICAL ESCRIPTION...
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Страница 463: ...Introduction CONTROL SYSTEM DESCRIPTION...
Страница 470: ...Introduction OWER ISTRIBUTION...
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Страница 479: ...Introduction LUMBING ESCRIPTION...
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Страница 490: ...Introduction REVENTATIVE AINTENANCE CHEDULES...
Страница 507: ...Introduction ECHANICAL AINTENANCE ROCEDURES...
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Страница 520: ...Maintenance Model 6DS SP Planarizer 9 12 Version 4 0 February 1998 Figure 9 7 Retainer Clamp Ring...
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Страница 691: ...Introduction OFTWARE ALIBRATION ROCEDURES...
Страница 703: ...Maintenance Model 6DS SP Planarizer 10 12 Version 4 0 February 1998 Figure 10 2 Manual Control Menu Screen Page 1...
Страница 707: ...Maintenance Model 6DS SP Planarizer 10 16 Version 4 0 February 1998 Figure 10 3 Manual Control Menu Screen Page 2...
Страница 710: ...Strasbaugh Software Calibration Procedures Version 4 0 February 1998 10 19 Figure 10 4 Manual Control Menu Screen Page 3...
Страница 713: ...Maintenance Model 6DS SP Planarizer 10 22 Version 4 0 February 1998 Figure 10 5 Diagnostics Menu...
Страница 716: ...Strasbaugh Software Calibration Procedures Version 4 0 February 1998 10 25 Figure 10 6 Calibration Configuration Menu...
Страница 862: ...Introduction NEUMATIC DJUSTMENTS...
Страница 897: ...Introduction OFTWARE ONTROL OMPUTER AINTENANCE...
Страница 912: ...Introduction TROUBLESHOOTING...
Страница 921: ...Strasbaugh Troubleshooting Version 4 0 February 1998 13 9 Figure 13 1 Alarm Log Menu...
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Страница 1005: ...Introduction APPENDICES...
Страница 1006: ...Introduction ALIBRATION ARIABLES IST...
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Страница 1467: ...Introduction SSEMBLY RAWINGS...
Страница 1468: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix B Engineering Drawings bound under separate cover Customer Parts Lists...
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Страница 1470: ...Introduction ARTS IST...
Страница 1471: ...Introduction LECTRICAL NPUT UTPUT...
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Страница 1474: ...Introduction PTIONS...
Страница 1476: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix D Options...
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Страница 1478: ...Introduction AINTENANCE OG HEETS...
Страница 1479: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix E Maintenance Log Sheets...
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Страница 1508: ...Introduction APPENDICES...
Страница 1509: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Manufacturer Data Attached CD...
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Страница 1534: ...Introduction APPENDICES...
Страница 1535: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Part 2 Manufacturers Data Sheets...
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Страница 1561: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Part 3 Manufacturers Data Sheets Go to Manufacturer Data...
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