Strasbaugh 6DS-SP, Руководство по эксплуатации

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STRASBAUGH, INC.
August 28, 1998 6DS-SP Software Ver 4.28 Page 6
Version 4.28 changes carrier loading for the front-to-back configuration (and all single table
configurations) if the bridge is not already at the load station. The bridge will now move to
the load area before the shuttle moves to the load area. Previously, the bridge and shuttle
moved simultaneously with the shuttle arriving first.
This change helps prevent damage if carriers with latches are improperly oriented or if
gimbaled carriers are tilted too much.
With this change, if a spindle quill interferes with any part of a carrier, the force will be only
that of the shuttle air cylinder instead of the much more powerful bridge movement.
Optional Wet Idle Robot to Scrubber Move:
Version 4.28 permits moving the robot to a scrubber station and extending the arm into the
station during wet idle. This places the end effector over a specially plumbed spray that is
teed into the left load rinse line (or any other suitable DI water source). When the load rinse
turns on in wet idle, some water will spray on the end effector. This spray can help prevent
drying of any residual slurry on the end effector.
This move will not be made if a wafer is on the end effector. Instead, the robot will simply
move to the usual position nearest the elevator doors and the arm will not extend.
Set Calibration Variable 55 "Robt to scrb@wet idle(0-n,1-y)" to "1" to enable this feature and
to "0" to disable.
Wet Idle of Unused Second Table:
Version 4.28 adds a feature that permits wet idling of an unused second table during an
automatic cycle.
Calibration Variable 56 "Wet unused TBL2 (0-no, 1 yes)" enables or disables the feature.
If set to yes, the second table will be wet idled during polishing if it is not used (has all polish
times set to zero). The second table speed and on/off times will be whatever is selected in the
Machine Parameters menu, page 2, for wet idle.
If set to no, the feature is disabled.
NOTE: If the feature is enabled and second table times are changed from values to all zeroes
while the machine is running, the second table wet idle will start automatically. However, if
changing from all zeroes to values, the second table may continue wet idle rotating until its
first polish step occurs.
AGV Data Display: