STRASBAUGH, INC.
August 11, 1995
6DS-SP Ver 4.15
Page 6
Lever Type Conditioning Arm Changes:
If the lever type conditioning arm is used, 5696 is now the correct value for
Calibration/configuration variable 129,
"Prog cond counts per inch".
If the lever type conditioning arm is used, 18.44 is now the correct value for
Calibration/configuration variable 155,
"Lever arm force at F.S. (lbs)".
The calibration limits for calibration/configuration variable 125, "
Prog cond park
position"
have been increased to +/- 15000 counts.
Added calibration/configuration variable 74
"Cond force amp offset (lbs)"
This is a "zero" adjustment and can be used as an alternative to the amplifier mounted
trimpot adjustment. Use the following procedure if you want to use this variable instead
of the amplifier's zero adjustment:
1) Set the condition force units in the Conditioning/Cleaning menu "lbs" if not
already set that way.
2) Record the value in variable 71 "Cond force dead weight (lbs)" and then set it to
0.
3) Make sure there is no force whatsoever on the condition force load cell.
4) Add any error seen in the "Cond (force)" value displayed in the status area to
whatever is currently in variable 74. The "Cond" display should now read zero.
5) Re-enter the original dead weight value (recorded in step 2) into variable 71.
6) Return the condition force units in the Conditioning/Cleaning menu to "psi" if it
had been changed to "lbs".
Additional reference information:
Lever arm servo setup information for the INIT1.DAN file is:
Proportional gain
-
20
Derivative gain
-
100
Integral gain
-
50
Integral limit
-
200
Acceleration
-
2500
Homing velocity
-
100000
(Software versions up to 4.15 contain servo initialization values only for the lift
type arm requiring editing of INIT1.DAN if the lever type arm is used.)
Amplifier current limit:
Содержание 6DS-SP
Страница 1: ......
Страница 4: ...Copyright 1998 by Strasbaugh All rights reserved Document prepared by Technical Publications Group...
Страница 19: ...Introduction INTRODUCTION...
Страница 58: ......
Страница 59: ...Introduction ACHINE ESCRIPTION...
Страница 108: ...Introduction PERATOR UNCTIONS...
Страница 131: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 23 Figure 3 4 Menu Selection...
Страница 134: ...Operations Model 6DS SP Planarizer 3 26 Version 4 0 February 1998 Figure 3 5 Home Machine Menu...
Страница 145: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 37 Figure 3 8 Recipe Management Menu...
Страница 150: ...Operations Model 6DS SP Planarizer 3 42 Version 4 0 February 1998 Figure 3 9 Home Machine Menu...
Страница 153: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 45 Figure 3 10 Auto Polish Cycle Menu...
Страница 166: ...Operations Model 6DS SP Planarizer 3 58 Version 4 0 February 1998 Figure 3 11 Slurry Flush Menu...
Страница 202: ...Operations Model 6DS SP Planarizer 3 94 Version 4 0 February 1998 This page intentionally left blank...
Страница 203: ...Introduction ACHINE ETUP...
Страница 210: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 7 Figure 4 2 Slurry Flush Menu...
Страница 213: ...Operations Model 6DS SP Planarizer 4 10 Version 4 0 February 1998 Figure 4 3 Recipe Management Menu...
Страница 216: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 13 Figure 4 4 Polish Parameters Menu...
Страница 223: ...Operations Model 6DS SP Planarizer 4 20 Version 4 0 February 1998 Figure 4 5 Sweep Parameters Menu...
Страница 236: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 33 Figure 4 8 Machine Parameters Menu Screen Page 1...
Страница 239: ...Operations Model 6DS SP Planarizer 4 36 Version 4 0 February 1998 Figure 4 9 Machine Parameters Menu Screen Page 2...
Страница 242: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 39 Figure 4 10 Machine Parameters Menu Screen Page 3...
Страница 247: ...Operations Model 6DS SP Planarizer 4 44 Version 4 0 February 1998 Figure 4 11 Alarm Parameters Menu...
Страница 251: ...Operations Model 6DS SP Planarizer 4 48 Version 4 0 February 1998 Figure 4 12 Machine Setup Menu...
Страница 254: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 51 Figure 4 13 Password Menu...
Страница 257: ...Operations Model 6DS SP Planarizer 4 54 Version 4 0 February 1998 This page intentionally left blank...
Страница 258: ...Introduction TROUBLESHOOTING...
Страница 267: ...Strasbaugh Troubleshooting Version 4 0 February 1998 5 9 Figure 13 1 Alarm Log Menu...
Страница 326: ...Introduction APPENDICES...
Страница 328: ...Operations Model 6DS SP Planarizer Version 4 0 February 1998 This page intentionally left blank...
Страница 329: ...Introduction LECTRIAL NPUT UTPUT...
Страница 331: ...Operations Model 6DS SP Planarizer This page intentionally left blank...
Страница 332: ......
Страница 335: ...Copyright 1998 by Strasbaugh All rights reserved Document prepared by Technical Publications Group...
Страница 355: ...Maintenance Model 6DS SP Planarizer xxii Version 4 0 February 1998 This page intentionally left blank...
Страница 356: ...Introduction REVISIONS...
Страница 357: ...Introduction INTRODUCTION...
Страница 395: ...Maintenance Model 6DS SP Planarizer 1 38 U Version 4 0 February 1998 Update 10 19 01 GUARANTEE WARRANTY CERTIFICATE...
Страница 396: ......
Страница 407: ...Strasbaugh Installation Version 4 0 February 1998 Update 11 06 01 2 11 U...
Страница 420: ...Maintenance Model 6DS SP Planarizer 2 24 U Version 4 0 February 1998 Update 11 06 01 This page intentionally left blank...
Страница 421: ...Introduction HYSICAL ESCRIPTION...
Страница 444: ...Introduction ECHANICAL ESCRIPTION...
Страница 462: ...Maintenance Model 6DS SP Planarizer 4 18 Version 4 0 February 1998 This page intentionally left blank...
Страница 463: ...Introduction CONTROL SYSTEM DESCRIPTION...
Страница 470: ...Introduction OWER ISTRIBUTION...
Страница 478: ...Maintenance Model 6DS SP Planarizer 6 8 Version 4 0 February 1998 This page intentionally left blank...
Страница 479: ...Introduction LUMBING ESCRIPTION...
Страница 489: ...Maintenance Model 6DS SP Planarizer 7 10 Version 4 0 February 1998 This page intentionally left blank...
Страница 490: ...Introduction REVENTATIVE AINTENANCE CHEDULES...
Страница 507: ...Introduction ECHANICAL AINTENANCE ROCEDURES...
Страница 516: ......
Страница 520: ...Maintenance Model 6DS SP Planarizer 9 12 Version 4 0 February 1998 Figure 9 7 Retainer Clamp Ring...
Страница 690: ...Maintenance Model 6DS SP Planarizer 9 182 Version 4 0 February 1998 This page intentionally left blank...
Страница 691: ...Introduction OFTWARE ALIBRATION ROCEDURES...
Страница 703: ...Maintenance Model 6DS SP Planarizer 10 12 Version 4 0 February 1998 Figure 10 2 Manual Control Menu Screen Page 1...
Страница 707: ...Maintenance Model 6DS SP Planarizer 10 16 Version 4 0 February 1998 Figure 10 3 Manual Control Menu Screen Page 2...
Страница 710: ...Strasbaugh Software Calibration Procedures Version 4 0 February 1998 10 19 Figure 10 4 Manual Control Menu Screen Page 3...
Страница 713: ...Maintenance Model 6DS SP Planarizer 10 22 Version 4 0 February 1998 Figure 10 5 Diagnostics Menu...
Страница 716: ...Strasbaugh Software Calibration Procedures Version 4 0 February 1998 10 25 Figure 10 6 Calibration Configuration Menu...
Страница 862: ...Introduction NEUMATIC DJUSTMENTS...
Страница 897: ...Introduction OFTWARE ONTROL OMPUTER AINTENANCE...
Страница 912: ...Introduction TROUBLESHOOTING...
Страница 921: ...Strasbaugh Troubleshooting Version 4 0 February 1998 13 9 Figure 13 1 Alarm Log Menu...
Страница 980: ...Maintenance Model 6DS SP Planarizer 13 68 Version 4 0 February 1998 This page intentionally left blank...
Страница 981: ......
Страница 984: ...Copyright 1998 by Strasbaugh All rights reserved Document prepared by Technical Publications Group...
Страница 1004: ...Maintenance Model 6DS SP Planarizer xxii Version 4 0 February 1998 This page intentionally left blank...
Страница 1005: ...Introduction APPENDICES...
Страница 1006: ...Introduction ALIBRATION ARIABLES IST...
Страница 1008: ...Maintenance Model 6DS SP Planarizer This page intentionally left blank...
Страница 1071: ...STRASBAUGH INC 6DS SP User Interface Reference May 31 2001 Ver 4 37 This page intentionally left blank...
Страница 1073: ...STRASBAUGH INC 6DS SP User Interface Reference May 31 2001 Ver 4 37 This page intentionally left blank...
Страница 1082: ...STRASBAUGH INC May 31 2001 Ver 4 37 6DS SP User Interface Reference Page 9 This page intentionally left blank...
Страница 1086: ...STRASBAUGH INC May 31 2001 Ver 4 37 6DS SP User Interface Reference Page 13 This page intentionally left blank...
Страница 1094: ...STRASBAUGH INC May 31 2001 Ver 4 37 6DS SP User Interface Reference Page 21...
Страница 1103: ...STRASBAUGH INC Page 30 6DS SP User Interface Reference May 31 2001 Ver 4 37...
Страница 1105: ...STRASBAUGH INC Page 32 6DS SP User Interface Reference May 31 2001 Ver 4 37 Continued on next page...
Страница 1111: ...STRASBAUGH INC Page 38 6DS SP User Interface Reference May 31 2001 Ver 4 37 This page intentionally left blank...
Страница 1115: ...STRASBAUGH INC Page 42 6DS SP User Interface Reference May 31 2001 Ver 4 37 This page intentionally left blank...
Страница 1119: ...STRASBAUGH INC Page 46 6DS SP User Interface Reference May 31 2001 Ver 4 37 This page intentionally left blank...
Страница 1123: ...STRASBAUGH INC Page 50 6DS SP User Interface Reference May 31 2001 Ver 4 37 This page intentionally left blank...
Страница 1467: ...Introduction SSEMBLY RAWINGS...
Страница 1468: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix B Engineering Drawings bound under separate cover Customer Parts Lists...
Страница 1469: ...Maintenance Model 6DS SP Planarizer This page intentionally left blank...
Страница 1470: ...Introduction ARTS IST...
Страница 1471: ...Introduction LECTRICAL NPUT UTPUT...
Страница 1473: ...Maintenance Model 6DS SP Planarizer This page intentionally left blank...
Страница 1474: ...Introduction PTIONS...
Страница 1476: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix D Options...
Страница 1477: ...Maintenance Model 6DS SP Planarizer This page intentionally left blank...
Страница 1478: ...Introduction AINTENANCE OG HEETS...
Страница 1479: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix E Maintenance Log Sheets...
Страница 1480: ...Maintenance Model 6DS SP Planarizer This page intentionally left blank...
Страница 1481: ......
Страница 1482: ......
Страница 1483: ......
Страница 1484: ......
Страница 1485: ......
Страница 1507: ...Maintenance Model 6DS SP Planarizer xxii Version 4 0 February 1998 This page intentionally left blank...
Страница 1508: ...Introduction APPENDICES...
Страница 1509: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Manufacturer Data Attached CD...
Страница 1510: ...Maintenance Model 6DS SP Planarizer This page intentionally left blank...
Страница 1511: ......
Страница 1533: ...Maintenance Model 6DS SP Planarizer xxii Version 4 0 February 1998 This page intentionally left blank...
Страница 1534: ...Introduction APPENDICES...
Страница 1535: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Part 2 Manufacturers Data Sheets...
Страница 1536: ...Maintenance Model 6DS SP Planarizer This page intentionally left blank...
Страница 1537: ......
Страница 1559: ...Maintenance Model 6DS SP Planarizer xxii Version 4 0 February 1998 This page intentionally left blank...
Страница 1560: ...Introduction APPENDICES...
Страница 1561: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Part 3 Manufacturers Data Sheets Go to Manufacturer Data...
Страница 1562: ...Maintenance Model 6DS SP Planarizer This page intentionally left blank...