FEI Quanta FEG 250, Руководство пользователя

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System Overview: Quanta FEG Options
2-8
• The small diameter , low voltage Back-Scatter Electron Detector
(BSED)
• The low-voltage, High-contrast Detector ( vCD )
• The Gaseous Analytical Detector (GAD) is the low voltage
BSED with an additional X-ray cone with a 500 µm Pressure
Limiting Aperture which seals to the objective pole piece.
• The solid state STEM I detector allows detection of electrons
transmitted through the sample. Regular voltage range is from
30 kV down to around 5 kV, which is of course dependent on the
sample thickness.
• The Annular STEM II detector
• quad BSED
• InColumn detector (ICD)
• The Centaurus Detector with back-scatter tip is a retractable,
scintillate-type BSE detector. Atomic number discrimination allows
a resolution better than 0.1 Z (when Z = 30).
The Cathodoluminiscence Tip for the Centaurus Detector
enables to convert it to a cathodoluminiscence detector.
• Autrata BSED
• ESEM GAD needle detector
• The Beam Deceleration improves the microscope resolution at low
accelerating voltages and enables to detect electrons heading
nearly parallel to a surface which accentuates a surface roughness.
• The WDX Completion Kit relocates the GSED detector connector
(bracket) and GSED pre amplifier bias feed-through to another
position in the SEM specimen chamber, to avoid geometrical
conflicts with the wavelength spectrometer.
• The Quick Loader
• The UPS
• The Nav-Cam
• The Automatic Aperture System offers the comfort of a
motorized final lens strip aperture exchange. The alignment
procedure provides a high precision of the setting.
• The Strip Aperture : 30 / 30 / 40 / 50 / 100 / 1000 µm
• The Strip Aperture : 10 / 15 / 20 / 30 / 30 / 1000 µm
• The Strip Aperture : 20 / 30 / 30 / 40 / 50 / 1000 µm
• The set of three apertures 400 µm, 3 mm diameter
• The set of two apertures 1250 µm, 3 mm diameter
• The Remote Control / Imaging
• The SIS Scandium Image software
• The SIS Scandium desktop license
• The SIS Scandium webRacer allows regular users with ID /
passwords (provided by the supervisor) to view and retrieve
worldwide database data, using any internet browser and any
computer system (PC, Apple, Sun…).
• The Quanta Morphologi is a method for precise determination of
size and shape of submicron particles dispersed in a dilution.
• The Basic SEM Course
• The Advanced Course SEM
• The On-site Training / Support