FEI Quanta FEG 250, Руководство пользователя

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System Options: Quick Loader
9-79
OPERATIONS
Loading a sample
1. Mount the sample with fast drying adhesive medium onto the stub.
Allow to dry.
2. Check the sample satisfies the sample limits imposed by placing
the top of the mounting tool over the base mount.
Caution!
If the sample proves to be too large this has to be addressed
before the sample and carrier should be allowed into the loader
chamber.
3. If the sample satisfies the limits, the sample loaded carrier can be
loaded into the loader chamber. The user can either remove from
or place a mounted carrier in the loader chamber by using
tweezers for stubs which will fit around the stub rim.
Rod Loading Sequence
1. While holding the sample carrier on the loading table in the loader
chamber move the rod out of the Parking position to the far left, to
the back of the slot and forward to engage the bayonet into the
sample carrier. Place the rod back into the Parking position after
coupling to prevent the rod slowly creeping forwards.
2. Switch OFF the electron and ion beam accelerating voltage.
Retract the GIS, Omniprobe or STEM modules (if present) to a
safe state (can not be used in combination with loader).
3. Close the loader chamber lid. After the lid is properly closed the P
button starts to shine.
4. Press the P button, the button stops to shine and the pumping
cycle starts, the stage moves to the loading position at the same
time. When the vacuum in the loader chamber is correct the pump
light starts to shine and the
OK button lights up indicating
operation can continue. The gate valve lever interlock is released.
5. Turn the Gate Valve knob lever from LOCK to UNLOCK position.
Then carefully pull the knob bar fully out from the first mark on the
knob drum to the second mark. Turn the knob bar to
(anticlockwise) to the LOCK position.
6. Move the loading rod from the Parking position into the chamber
while still holding the rod bar. The Sample Carrier will engage with
the Stage Adapter at the end of the rod travel.
7. Turn the rod bar to the left (anticlockwise) to the base of the slot;
pull back on the rod bar so it travels along the base of the slot, then
turn to the right (clockwise) so that the rod bar is vertical and
withdraw it back to the PARK slot at he far end of the rod guide.
8. Close the Gate Valve by turning the knob bar to the UNLOCK
position and press the knob in to engage the valve over the
opening, this can be seen through the lead glass lid, then turn the
knob bar to the LOCK position to secure the valve. Good practice
is to leave the loader chamber under vacuum.