FEI Quanta FEG 250, Руководство пользователя

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System Options: Optional Detectors
9-12
Load In Row Holder
1. Place the row holder to the load base (the load base pin is beneath
the position you want to load in / out). Tighten it by the screw knob,
the pin lifts up the spring.
If the pin does not lift up the spring enough to put the sample in,
adjust the lifting height by turning the screw.
2. Insert a sample under the row holder spring.
3. Release the screw knob and the entire row holder from the load
base.
4. Repeat steps No. 1 - 4 to load in / out another samples.
5. Put the row holder to the holder arm.
FIGURE 9-7 ROW HOLDER ON THE LOAD BASE /
ROW HOLDER ATTACHMENT INTO HOLDER ARM
Inserting and Retracting STEM II Detector
Caution!
Always take care of any stage movement does not hit the STEM II
detector. Any collision can cause its damage.
Before insertion the retractable STEM II detector, the user needs to
check the following conditions:
• Chamber is pumped to HiVac or LoVac condition.
• The Link Z to FWD procedure must be done
(when focused on the top sample surface).
• The stage position must be within following values:
X -axis: min : -1.5 mm / max : unlimited
Y -axis: min : unlimited / max : unlimited
Z -axis: min : 3 mm / max : 10 mm
Rotation : 50 mm stage: +90° / 100 and 150 mm stages: -60°
Tilt : min : -2° / max : 2°
This position enables to observe all samples in the row holder. It
gives a guideline to prevent the STEM II detector crash.
If the above mentioned conditions are not fulfilled, the Insert button is
not active (a tooltip occurs under the mouse cursor).
By clicking the Insert button the dialogue appears asking a
confirmation of detector insertion. The Tilt and the Z-axis stage
movements are limited to the above mentioned values.
Retracting the STEM II is automaticall with the Stopping / Starting the
server or venting the chamber. Otherwise user can use the
Retract
button.
When the detector is retracted, the information text is displayed in
each quad which uses it.