Dressler CESAR 1312, Руководство пользователя

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CESAR 1312 (E) Installation, Setup, and Operation 5-45
CESAR™ 1312 Generator
• External pulsing
The pulsing of the Cesar generator will work according to the gating pulse
signal applied to the analog
User Port . The pulse-gating signal must be
of a 5 V TTL/CMOS level.
To Select Internal or External Pulsing Through the Host Port:
If you are using RS-232 , PROFIBUS , or Ethernet to control and monitor the
CESAR generator:
1. Set the desired pulse setting:
Send one data byte for command 27 (see Table 4-16 on page 4-63 ):
4
0 = Pulsing off
4
1 = Internal pulsing
4
2 = External pulsing
4
3 = External pulsing inverted
4
4 = Enable internal pulsing by external pulsing input
2. Set the desired pulse frequency value:
Send three data bytes, least significant byte first, for command 93
representing the pulsing frequency in Hertz (see Table 4-16 on
page 4-63 ).
3. Select a duty cycle value:
Send two data bytes, least significant byte first, for command 96
representing the duty cycle as a percentage (see Table 4-16 on
page 4-63 ).
To Select Internal or External Pulsing Using the CESAR Generator Front Panel,
see instructions on
page 5-33 .
Creating Recipes
This feature enables you to create a power profile that may provide up to four
time frames. You can choose to program one of the two recipe settings using
the CESAR generator front panel:
1. Rise/fall time recipe
This feature allows gradual, well-controlled development of the rising and
falling edge of the RF power envelope, which differs significantly from
common RF power functionality which has a fast and uncontrolled rise
time. You can program your “critical plasma system” to strike smoothly
with a well-controlled rising edge of the RF power.
4
The rising edge of the RF envelope can be set to have a linear rise time
of 0.1 seconds to 60 seconds. The time increment is 0.1 seconds.
4
The falling edge of the RF envelope can be set to have a linear fall time
of 0.1 seconds to 60 seconds. The time increment is 0.1 seconds.