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CESAR 1312 (E)

Installation, Setup, and Operation

5-31

CESAR™ 1312 Generator

In load power regulation, the CESAR Generator regulates RF power with
constant load (real) power.

•

External power regulation (DC Bias)

In external power regulation, the CESAR Generator regulates RF power
at a constant DC self bias voltage in the chamber. The RF output power
can be limited to protect your plasma chamber against high RF power.
This limitation is useful if there is no self bias voltage in the beginning of
the process.

To Select a Regulation Mode Using the CESAR Generator Front Panel:

1. Press the

Program

soft key.

2. Press

Next

until you see

Control Settings

on the display.

3. Press

Change

.

4. Press the soft key for the desired regulation mode:

Control P

forward

,

Control P

real

, or

Control DC Bias

.

5. For

P

forward

or

P

real

regulation mode, set the desired power set point

between 0 W and 1.2 kW using a combination of the

Increm Auto

key and

the

RF

POWER

dial knob.

6. For

DC Bias

control, set a DC Bias value using a combination of the

Increm Auto

key and the

RF POWER

dial knob.

4

The value can be between 0 V and 4000 V

Note:

4000 V is the default value. To change the default settings, see

“To Change the Default Device Configuration Settings Using the
CESAR Generator Front Panel:” on page 5-41

7. Press

Ok

to confirm.

8. For

DC Bias

control, set a P

forward

maximum value between 60 W and 1.2

kW using a combination of the

Increm Auto

and the

RF POWER

dial

knob.

9. Press

Ok

to confirm.

10. Press

Exit

.

11. Press

Execute

.

The operating screen will change to display the new control settings and
values.

MATCH SETTINGS

If your RF power delivery system includes a Dressler Variomatch connected to
the matching interface of the CESAR generator, you can use this function to
control the matching network. This function enables you to set initial tuning

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Содержание CESAR 1312

Страница 1: ...U s e r M a n u a l s e r v i c e d r e s s l e r c o m CESAR Generator Model 1312 ...

Страница 2: ......

Страница 3: ...User Manual CESAR Generator Model 1312 CESAR 1312 E ...

Страница 4: ...iance on or use of the information contained herein PRODUCT USAGE STATEMENT Read this entire manual and all other publications pertaining to the work to be performed before you install operate or maintain this equipment Practice all plant and product safety instructions and precautions Failure to follow instructions can cause personal injury and or property damage If the equipment is used in a man...

Страница 5: ... please contact the Dressler Customer Service Department service dressler com is a registered trademark of Dressler HF Technik GmbH CESAR is a trademark of Dressler HF Technik GmbH Internet Explorer is a registered trademark of the Microsoft Corporation Microsoft is a registered trademark of the Microsoft Corporation Modbus is a registered trademark of Gould Inc Smith The Smith chart shown is prod...

Страница 6: ...iv CESAR 1312 E Dressler HF Technik GmbH ...

Страница 7: ...ompliance Directives and Standards 1 5 Electromagnetic Compatibility EMC Directives and Standards 1 5 Safety Directives and Standards 1 6 Conditions of Use 1 6 Interlocks and Limits 1 7 Chapter 2 Product Overview and Theory Description 2 1 Theory of Operation 2 2 Chapter 3 Specifications Physical Specifications 3 1 Unit Dimensions 3 2 Physical Specifications Table 3 3 Electrical Specifications 3 4...

Страница 8: ...Connector and Pin Descriptions 4 51 PROFIBUS Protocol 4 51 Host Port Ethernet Modbus TCP 4 56 Understanding Modbus TCP Commands and Register Types 4 57 Host Port Commands 4 61 Activating Host Port Control 4 62 Host Port Command Status Response CSR Codes 4 62 Host Port Command Set 4 62 Chapter 5 Installation Setup and Operation Preparing to Install the CESAR Generator 5 1 Spacing Requirements 5 1 I...

Страница 9: ...Front Panel Control Elements 5 25 Using the Front Panel Program Menu 5 26 Accessing the Program Menu 5 27 Entering Values in the Program Menu 5 28 Front Panel Program Menu Tree 5 29 Regulation Mode Settings 5 30 Match Settings 5 31 Setting the Pulse Function 5 33 Recipe Settings 5 34 Setting Remote Control Override 5 37 Setting Target Lifetime PARAMETERS 5 38 Reflected Power Settings 5 39 Changing...

Страница 10: ...oblems 6 4 Capacitor Failure 6 4 Incorrect Input Voltage 6 5 Improper Impedance Range 6 5 Improper RF Connection or Cabling 6 5 Improper Grounding 6 6 Improper Interface Connection 6 6 Improper Tuning Adjustment 6 7 Checking for and Resolving Errors and Warnings 6 7 World Wide Web Site 6 12 Customer Support 6 14 Returning Units for Repair 6 16 Warranty 6 16 Authorized Returns 6 17 Warranty Stateme...

Страница 11: ...VOLT DC signal wiring pins 13 and 21 4 26 Fig 4 18 SET POINT STATUS signal wiring pins 14 and 1 4 26 Fig 4 19 OVERTEMPERATURE signal wiring pins 22 and 9 4 27 Fig 4 20 INTERLOCK SATISFIED signal wiring pins 24 and 11 4 27 Fig 4 21 BLANKING PULSING signal wiring pins 25 and 19 4 28 Fig 4 22 15 pin User Port connector 4 28 Fig 4 23 Interlock interface connector 4 30 Fig 4 24 OPERATING MODE A wiring ...

Страница 12: ...le 4 50 Fig 4 42 PROFIBUS port connector 4 50 Fig 4 43 Ethernet connector 4 57 Fig 5 1 Output RF Out connector 5 4 Fig 5 2 CEX Interconnect 5 7 Fig 5 3 Input Mains connector 5 8 Fig 5 4 Front panel 5 24 Fig 5 5 Front panel program menu tree 5 29 Fig 5 6 Front panel program menu tree continued 5 30 ...

Страница 13: ... regulation mode with 15 pin User Port pins 1 and 2 4 35 Table 4 6 RS 232 host pin descriptions 4 44 Table 4 7 PROFIBUS Host port pins 4 51 Table 4 8 PROFIBUS status LEDs 4 52 Table 4 9 Configuration of download bytes outbytes 4 54 Table 4 10 Configuration of upload packet inbytes 4 55 Table 4 11 Upload status bytes 4 56 Table 4 12 Packet format for FC23 send 4 58 Table 4 13 Packet format for FC23...

Страница 14: ...xii List of Tables CESAR 1312 E Dressler HF Technik GmbH ...

Страница 15: ... Safety Guidelines on page 1 3 INTERPRETING THE MANUAL The following sections provide information to help you interpret this user manual This Revision of the Manual This revision of the manual provides information associated with software release 1 16 This version of the software included changes to the error and warning messages Please use an appropriate revision of this manual for earlier versio...

Страница 16: ...e To determine which option you have find the serial tag affixed to the unit the part number is on the serial tag Type Conventions Please note the following type conventions Pin and signal names appear in capitalized italics RF POWER ON New terms appear in italicized text Unit labels switches indicators and so on appear in boldface text Mains Commands 1 and command names regulation select appear i...

Страница 17: ... operate this equipment without proper training There are no user serviceable parts inside the CESAR generator Refer servicing to trained service personnel see Customer Support on page 6 14 Ensure that this unit is properly grounded see also Grounding on page 5 4 DANGER indicates an imminently hazardous situation that if not avoided will result in death or serious injury DANGER is limited to the m...

Страница 18: ...on page 4 42 Verify that input line voltage and current capacity are within specifications before turning on the power supplies see Electrical Specifications on page 3 4 Use proper electrostatic discharge ESD precautions Always be careful around this equipment Interpreting Product Labels The following labels may appear on the unit Capacitor discharge warning CE label Hazardous voltage No user serv...

Страница 19: ...compatibility EMC and safety directives and standards Note This device must be installed and used only in compliance with the directives and standards listed in addition to VDE 0113 EN 60204 IEC 60204 and applicable requirements ELECTROMAGNETIC COMPATIBILITY EMC DIRECTIVES AND STANDARDS Table 1 2 Electromagnetic compatibility EMC directives and standards Directive Description 89 336 EEC EC Council...

Страница 20: ...operation Occasionally condensation causes temporary conductivity when the device is not operating Install this device so that it is fully enclosed by a rack or other enclosure The rack or enclosure must be metal and either reinforced or of sufficient thickness to resist the following tests 4A steady force of 445 N applied through a steel hemisphere 12 7 mm in diameter 4An impact of 7 J applied by...

Страница 21: ...ll this device so that the output power RF Out connection is inaccessible to the user The AC cord must be terminated according to the applicable requirements see Specifications on page 3 1 INTERLOCKS AND LIMITS All CESAR generators have an Interlock interface This interface allows you to integrate any CESAR generator into a system interlock loop that can interrupt the delivered RF power Even if yo...

Страница 22: ...isted in the table Using the interlock jumper plug disables the interlock function Table 1 4 CESAR generator limits Limit Unit Response and User Resolution RF power limit When the unit reaches the forward or reflected power limit the unit reduces forward power to remain within the limits Output is not at set point For more information see W11 W12 and W13 in Table 6 2 on page 6 11 See also pin 14 i...

Страница 23: ...ble 6 2 on page 6 11 External pulse frequency limit When the external pulse frequency exceeds the limit the unit turns RF power off For more information see W40 in Table 6 2 on page 6 11 Target lifetime limit The target lifetime warning occurs when the target lifetime reaches the user set limit This warning does not affect the operation of the unit For more information see W50 in Table 6 2 on page...

Страница 24: ...1 10 Safety and Product Compliance Guidelines CESAR 1312 E Dressler HF Technik GmbH ...

Страница 25: ...5 Both manual and automatic tuning control support operation into a fixed impedance matching network which simplifies system complexity increases reliability and improves process to process repeatability see Controlling the Matchbox on page 5 20 You can control the CESAR generator remotely through an analog User Port see CESAR Generator User Port Options on page 4 10 or a serial Host port see CESA...

Страница 26: ...ry of operation Module Description 1 Analog I O This module provides the User interface 2 Driver Exciter This module generates power at the designated output frequency to drive the main RF sections and contains the CEX functions 3 RF Amplifiers This module generates RF power 4 RF Measure This module samples the output signal and sends it to the sensor electronics 5 Digital Controller This module i...

Страница 27: ...L SPECIFICATIONS The following sections describe the dimensions and physical specifications of the CESAR generator All generator specifications are also available online please visit http www dressler com products generators Unit Dimensions on page 3 2 Physical Specifications Table on page 3 3 ...

Страница 28: ...3 2 Specifications CESAR 1312 E Dressler HF Technik GmbH Unit Dimensions The following illustration shows the dimensions of the CESAR generator Figure 3 1 CESAR Generator unit dimensions ...

Страница 29: ...anel For more information see Mounting the CESAR Generator on page 5 3 Connector Cable specifications AC input power IEC 320 connector For more information see Connecting AC Input Mains Power on page 5 8 RF output N Type female connector For more information see Connecting RF Output Power on page 5 4 User Port Analog I O There are two analog interface options available for the CESAR generator A 25...

Страница 30: ...net Modbus TCP connection see also Host Port Ethernet Modbus TCP on page 4 56 To determine which host port you have see Understanding Model 1312 Options on page 1 2 For more information on the Host port options see CESAR Generator Host Port Options on page 4 42 CEX CEX BNC female Front panel display LCD graphic display Table 3 1 Physical specifications Continued Description Specification Table 3 2...

Страница 31: ...put all harmonics are 50 dB below the RF output signal when operated into a 50 Ω nonreactive load impedance All spurious nonharmonic outputs are 60 dB below the RF output signal RF Power Regulation 1 0 of set point or 0 1 of full rated power whichever is greater RF Power Stability 1 0 of set point or 0 2 of full rated power whichever is greater RF Power Response Time For detailed specifications of...

Страница 32: ...ir Minimum air flow 118 m3 h 69 45 cfm Table 3 4 Climatic specifications Temperature Relative Humidity Air Pressure Operating 5 C to 35 C 41 F to 95 F Class 3K2 10 to 85 Note 1 2 g m3 to 25 g per m3 Class 3K3 80 kPa to 106 kPa 800 mbar to 1060 mbar approximately 2000 m above sea level Note 1 Noncondensing Note 2 Maximum relative humidity when the unit temperature slowly increases or when the unit ...

Страница 33: ... 66 kPa to 106 kPa 660 mbar to 1060 mbar approximately 3265 m above sea level Table 3 4 Climatic specifications Continued Temperature Relative Humidity Air Pressure Note 1 Noncondensing Note 2 Maximum relative humidity when the unit temperature slowly increases or when the unit temperature directly increases from 25 C to 30 C Note 3 Maximum absolute humidity when the unit temperature directly decr...

Страница 34: ...3 8 Specifications CESAR 1312 E Dressler HF Technik GmbH ...

Страница 35: ...w with 15 pin User port and RS 232 port pn 61300056 see Figure 4 1 on page 4 2 For an illustration of the Rear view with 15 pin User port and Ethernet port pn 61300057 see Figure 4 2 on page 4 3 For an illustration of the Rear view with 15 pin User port and PROFIBUS port pn 61300058 see Figure 4 3 on page 4 4 For an illustration of the Rear view with 25 pin User port and RS 232 port pn 61300059 se...

Страница 36: ...4 2 Communication Interfaces CESAR 1312 E Dressler HF Technik GmbH REAR VIEW DRAWINGS Figure 4 1 Rear view with 15 pin User port and RS 232 port pn 61300056 ...

Страница 37: ...CESAR 1312 E Communication Interfaces 4 3 CESAR 1312 Generator Figure 4 2 Rear view with 15 pin User port and Ethernet port pn 61300057 ...

Страница 38: ...4 4 Communication Interfaces CESAR 1312 E Dressler HF Technik GmbH Figure 4 3 Rear view with 15 pin User port and PROFIBUS port pn 61300058 ...

Страница 39: ...CESAR 1312 E Communication Interfaces 4 5 CESAR 1312 Generator Figure 4 4 Rear view with 25 pin User port and RS 232 port pn 61300059 ...

Страница 40: ...4 6 Communication Interfaces CESAR 1312 E Dressler HF Technik GmbH Figure 4 5 Rear view with 25 pin User port and Ethernet port pn 61300060 ...

Страница 41: ...CESAR 1312 E Communication Interfaces 4 7 CESAR 1312 Generator Figure 4 6 Rear view with 25 pin User port and PROFIBUS port pn 61300061 ...

Страница 42: ...ctor Figure 4 7 illustrates the connector and Table 4 1 describes each pin Note This interface is will not work with other matching networks unless they are electrically compatible Figure 4 7 Matching Interface connector Table 4 1 Matching Interface pin descriptions Pin Name Signal Type Level Description 1 GROUND Connect to the shield of the cable for example RC cable 2 DECREASE CLoad Digital Outp...

Страница 43: ...ble 10 NO CONNECTION 11 STATUS Digital Input 15 V This pin connects the 15 V output voltage of the Variomatch unit to indicate if a match network is connected 12 DC BIAS MEASURE VOLTAGE Analog Input 0 V to 10 V This pin reads a test voltage of the DC self bias voltage The scaling is adjustable For example in the default configuration of the Dressler Variomatch 4000 V bias voltage is equal to 10 V ...

Страница 44: ...g requirements and detailed information about the User port signals User Port 25 Pin User Port This section describes the 25 pin User Port port For information on the 15 pin User Port see User Port 15 Pin User Port on page 4 28 Note To determine which option you have see Understanding Model 1312 Options on page 1 2 14 POSITION OF LOAD CAPACITOR Analog Input 0 V to 10 V The voltage at this input is...

Страница 45: ...where you do not intend to connect the remaining pins on this port 25 PIN USER PORT CABLING REQUIREMENTS Connect the CESAR generator s 25 pin User Port to the system controller with a shielded 25 wire I O cable Shielded twisted pair wiring is recommended but not mandatory Minimize signal losses by keeping the cable as short as possible The maximum recommended cable length between the Dressler HF T...

Страница 46: ...o a local earth ground through an adequately sized copper grounding strap Note Grounding the User Port at the CESAR generator reduces noise interference To avoid ground loop problems you should typically ground only one end of the User Port cable ACTIVATING THE 25 PIN USER PORT To activate the 25 pin User Port control 1 Press the Program soft key 2 Press Next until you see Device Configuration on ...

Страница 47: ...le 4 2 25 pin User Port pin descriptions Pin Number Return Pin Name Signal Type Description 1 Return for pin 14 See pin 14 2 15 REFLECTED POWER MONITOR Analog output This signal provides a linearly scaled readback of reflected power as measured at the generator output The default range is 0 V to 10 V but you can change this range see Analog Outputs on page 4 21 Default setting 0 V to 10 V 0 W to 1...

Страница 48: ...The default range is 0 V to 10 V but you can change this range see Analog Outputs on page 4 21 For a description of regulation mode see Setting Regulation Mode on page 5 15 To change control settings see pin 8 Default setting 0 V to 10 V 0 W to 1 2 kW For a wiring diagram see Figure 4 10 on page 4 22 Pin 16 must be grounded Table 4 2 25 pin User Port pin descriptions Continued Pin Number Return Pi...

Страница 49: ...1 5 V or less to this pin For a wiring diagram see Figure 4 11 on page 4 23 Note Before the CESAR generator can deliver power the interlock must be satisfied see Satisfying Minimal 25 Pin User Port Requirements on page 4 11 and the set point must be within the output power range see Electrical specifications on page 3 4 Pin 17 must be grounded Table 4 2 25 pin User Port pin descriptions Continued ...

Страница 50: ...0 W to 1 2 kW For DC bias regulation the scaling of the set point must be the same as for the DC bias signal see pin 7 For a wiring diagram see Figure 4 12 on page 4 23 6 19 RF FORWARD POWER DC BIAS REGULATION Digital input Use this signal to select DC bias or RF power regulation mode To regulate on DC bias input apply a positive voltage of 4 V to 30 V to this pin To regulate on forward or load po...

Страница 51: ...uts on page 4 20 Default setting 0 V to 10 V 0 V to 4000 V Typically matching networks provide a DC bias voltage monitor signal When this scaled representation of the DC bias voltage is used for DC bias regulation see pin 6 the scaling must be the same as for the set point see pin 5 Dressler Variomatch matching networks provide a DC bias voltage monitor signal for regulation through the Matching I...

Страница 52: ...on mode For a wiring diagram see Figure 4 15 on page 4 25 9 Return for pin 22 See pin 22 10 23 INTERLOCK LOOP Digital input To satisfy the interlock and enable RF power in the generator close an external loop from pin 23 to pin 10 A resistance of 15 Ω or less across this pin closes the loop Pin 23 feeds this loop via a current limiting circuit maximum 120 mA Alternatively you can satisfy the inter...

Страница 53: ...in 15 must be grounded at the host 16 Return for pin 3 See pin 3 Pin 16 must be grounded at the host 17 Return for pin 4 See pin 4 18 Return for pin 5 See pin 5 19 N A DC GROUND Chassis ground DC ground connection common to chassis ground 20 Return for pin 7 See pin 7 21 N A CHASSIS GROUND Chassis ground DC ground connection common to chassis ground 22 9 OVERTEMP Digital output When an internal ov...

Страница 54: ...gram see Figure 4 20 on page 4 27 25 19 BLANKING PULSING Pulse input When Pulse Settings is set to External this pin allows you to pulse blank the RF power Set the required logic for RF on and off through the front panel menu see Changing the Pulse Input Configuration Settings on page 5 39 When Pulse Settings is set to Internal this pin allows you to switch between internal pulsing and continuous ...

Страница 55: ...a 10 kΩ or higher impedance to these signals The readback signals represent the forward and reflected power as measured at the output of the CESAR generator Digital Inputs Pins 4 6 8 and 10 are opto coupled The user s signal drives the LED in the opto coupler through a 4 7 kΩ resistor A signal level of 4 V to 30 V applied to the input pin activates the signal Digital Outputs The status signals pro...

Страница 56: ...The following schematics illustrate how to properly connect the CESAR generator User Port For detailed pin descriptions see 25 Pin User Port Pin Descriptions on page 4 13 Figure 4 9 REFLECTED POWER MONITOR signal wiring pins 2 and 15 Figure 4 10 RF FORWARD LOAD POWER MONITOR signal wiring pins 3 and 16 ...

Страница 57: ...CESAR 1312 E Communication Interfaces 4 23 CESAR 1312 Generator Figure 4 11 RF POWER ON signal wiring pins 4 and 17 Figure 4 12 SET POINT signal wiring pins 5 and 18 ...

Страница 58: ...4 24 Communication Interfaces CESAR 1312 E Dressler HF Technik GmbH Figure 4 13 RF FORWARD POWER DC BIAS REGULATION wiring pins 6 and 19 Figure 4 14 DC BIAS MONITOR signal wiring pins 7 and 20 ...

Страница 59: ...CESAR 1312 E Communication Interfaces 4 25 CESAR 1312 Generator Figure 4 15 RF FORWARD LOAD REGULATION signal wiring pins 8 and 21 Figure 4 16 INTERLOCK LOOP signal wiring pins 10 and 23 ...

Страница 60: ...4 26 Communication Interfaces CESAR 1312 E Dressler HF Technik GmbH Figure 4 17 15 VOLT DC signal wiring pins 13 and 21 Figure 4 18 SET POINT STATUS signal wiring pins 14 and 1 ...

Страница 61: ...CESAR 1312 E Communication Interfaces 4 27 CESAR 1312 Generator Figure 4 19 OVERTEMPERATURE signal wiring pins 22 and 9 Figure 4 20 INTERLOCK SATISFIED signal wiring pins 24 and 11 ...

Страница 62: ...the 25 pin User Port see User Port 25 Pin User Port on page 4 10 Note To determine which User port you have see Understanding Model 1312 Options on page 1 2 The 15 pin User Port option offers basic control and monitoring capability The 15 pin User Port has a shielded male subminiature D connector see Figure 4 22 that connects the generator with an external remote control unit Figure 4 22 15 pin Us...

Страница 63: ... interlock jumper plug that provides a connection between the interlock pins You can use this jumper plug to satisfy the interlock and enable operation in situations where you do not intend to connect the remaining pins on this port Dressler HF Technik GmbH s products only include interlocks and limits when required by product specification Interlocks and limits in Dressler HF Technik GmbH product...

Страница 64: ... pin 2 via the user s external interlock loop You may also provide a 5 VDC to 24 VDC signal referenced to pin 3 to satisfy the interlock 2 INTERLOCK OUTPUT 3 Output floating 15 V Contact closure to pin 1 via the user s external interlock loop This voltage output is floating and has no reference to ground 3 INTERLOCK RETURN floating 0 V This is the return pin for an external interlock signal This p...

Страница 65: ...se specified all analog signals are 0 V to 10 V while all digital signals are 5 V or VInterface 15 PIN USER PORT PIN DESCRIPTIONS Table 4 4 describes the connector pins for the 15 pin User Port Table 4 4 15 pin User Port pin descriptions Pin Number Return Pin Name Signal Type Description 1 8 OPERATING MODE A Digital input Connecting pin 1 and pin 2 to a high or low level allows you to set the regu...

Страница 66: ...is error may occur in the following situations In DC Bias regulation mode the RF power necessary for the desired DC Bias voltage may be higher than the generator is able to deliver In RF Preal power regulation mode the forward power necessary for the load power may be higher than the generator is able to deliver The external pulsing frequency exceeds the limit For specifications see RF pulse frequ...

Страница 67: ...ent of 300 mA depending on the load at the outputs For a wiring diagram see Figure 4 30 on page 4 39 8 GROUND Reference pin 9 8 BLANKING PULSE MODE TTL Input Pulse signal input A TTL square wave input that allows RF power blanking Use this input if the internal pulsing capabilities do not meet your requirements When external pulsing is not used this input may be set up to switch between continuous...

Страница 68: ...ER SET POINT Analog input This signal provides a linearly scaled setting to the RF forward power The default range is 0 V to 10 V but you can change this range see Analog Inputs on page 4 20 For example 5 V 50 of the nominal generator power 10 V 100 For a wiring diagram see Figure 4 34 on page 4 41 13 8 TEST VOLTAGE FOR FORWARD POWER Analog output This signal provides a linearly scaled readback of...

Страница 69: ...s a linearly scaled setting to DC self bias voltage as measured at the matching network The default range is 0 V to 10 V but you can change this range see Analog Outputs on page 4 21 For example 5 V 50 of the nominal DC bias 4 kV 10 V 100 For a wiring diagram see Figure 4 37 on page 4 42 Table 4 4 15 pin User Port pin descriptions Continued Pin Number Return Pin Name Signal Type Description Table ...

Страница 70: ...SER PORT WIRING DIAGRAMS The following schematics illustrate how to properly connect the CESAR generator 15 pin User Port For detailed pin descriptions see Table 4 4 Figure 4 24 OPERATING MODE A wiring diagram pins 1 and 8 Figure 4 25 OPEATING MODE B wiring diagram pins 2 and 8 ...

Страница 71: ...CESAR 1312 E Communication Interfaces 4 37 CESAR 1312 Generator Figure 4 26 READY STATUS wiring diagram pins 3 and 8 Figure 4 27 ERROR wiring diagram pins 4 and 8 ...

Страница 72: ...4 38 Communication Interfaces CESAR 1312 E Dressler HF Technik GmbH Figure 4 28 MAXIMUM POWER LEVEL REACHED wiring diagram pins 5 and 8 Figure 4 29 RF ON wiring diagram pins 6 and 8 ...

Страница 73: ...CESAR 1312 E Communication Interfaces 4 39 CESAR 1312 Generator Figure 4 30 INTERFACE VOLTAGE wiring diagram pins 7 and 8 Figure 4 31 BLANKING PULSING MODE wiring diagram pins 9 and 8 ...

Страница 74: ...4 40 Communication Interfaces CESAR 1312 E Dressler HF Technik GmbH Figure 4 32 RF POWER ON wiring diagram pins 10 and 8 Figure 4 33 DC BIAS SET POINT wiring diagram pins 11 and 8 ...

Страница 75: ...CESAR 1312 E Communication Interfaces 4 41 CESAR 1312 Generator Figure 4 34 RF POWER SET POINT wiring diagram pins 12 and 8 Figure 4 35 TEST VOLTAGE FOWARD POWER wiring diagram pins 13 and 8 ...

Страница 76: ...OR DC BIAS wiring diagram pins 15 and 8 CESAR GENERATOR HOST PORT OPTIONS The CESAR generator has three serial communications host port interface options that allow the generator to interface with a host computer The following sections provide information for each of the host port options available with the CESAR generator Host Port RS 232 With AE Bus on page 4 43 ...

Страница 77: ...61 Host Port RS 232 With AE Bus This section describes the RS 232 host port For information on the PROFIBUS host port see Host Port PROFIBUS on page 4 50 For information on the Ethernet host port see Host Port Ethernet Modbus TCP on page 4 56 Note To determine which option you have see Understanding Model 1312 Options on page 1 2 The RS 232 AE Bus host port interface uses an RS 232 signal format a...

Страница 78: ...S 232 host port is limited to the following parameters RS 232 protocol transmission standard Five baud rates selected on the front panel see Changing the Device Configuration Settings on page 5 40 49600 419200 438400 Table 4 6 RS 232 host pin descriptions Signal Pin Name Description 1 NO CONNECTION Reserved for future use 2 TXD RS 232 transmit data 3 RXD RS 232 receive data 4 NO CONNECTION Reserve...

Страница 79: ... receive pin is normally pin 2 for a standard 9 pin serial port and normally pin 3 for a standard 25 pin serial port AE BUS PROTOCOL The AE Bus protocol uses pure binary data nothing is coded in ASCII and is designed to facilitate direct communications between a host computer and the CESAR generator The AE Bus message packet combines a set quantity of bits and bytes in such a way that groups of in...

Страница 80: ...d for the network broadcast address when this address is used in a Host originated packet all units execute the packet but do not respond to the host The remaining three bits bits 0 1 and 2 are the length bits These bits tell the receiving unit how long the Data field is so that the unit can determine when it has received the entire message If the Data field contains more than six bytes the value ...

Страница 81: ...t require data sometimes the Data field is not present If the value specified in the length bits bits 0 1 and 2 of the Header field is 0 to 6 the CESAR generator expects zero to six data bytes However if the value in the Header field is 7 07h the CESAR generator looks for the Optional Length byte after the Command field and reads this value to calculate the data byte count Unless otherwise specifi...

Страница 82: ...cket to the CESAR generator The packet contains one of the following A command that requests data or status information A command and data that change a parameter setting An executable command T1 Unit Verifies Host Transmission Packet Once the CESAR generator receives the host computer transmission message packet the CESAR generator verifies that the message is intended for it and not for another ...

Страница 83: ...ver else it has been programmed to do in this situation If the Host receives an ACK 06h it waits for the requested data or status information or it waits for the CSR code telling it whether or not the new parameter was accepted If the Host receives no response within a reasonable period it takes whatever action it has been programmed to take T2 Unit Transmits Response to Host The CESAR generator p...

Страница 84: ...t host port see Host Port Ethernet Modbus TCP on page 4 56 Note To determine which option you have see Understanding Model 1312 Options on page 1 2 The PROFIBUS host port on the CESAR generator consists of a 9 pin female subminiature D connector two status LEDs and two rotary address switches located beside the connector This section describes the PROFIBUS status LEDs pins and communication protoc...

Страница 85: ...ibe the PROFIBUS protocol Please note that Dressler s PROFIBUS protocol does not support the following functions address changing freeze unfreeze modes or sync modes PROFIBUS Type Files GSD Files Type files are computer files that some Programmable Logic Controllers PLCs use to compile PROFIBUS programs These files are device specific and contain information on features found in that device Thus a...

Страница 86: ...your CESAR generator is the last slave on the PROFIBUS cable The termination resistors should be on the connector housing of the PROFIBUS cable not included PROFIBUS Baud Rate The auto baud feature of Dressler s certified PROFIBUS interface adjusts automatically to the rate of the PROFIBUS master system Baud rates are available in discrete steps from 9600 bits 9 6 kbits to 12 Mbits The auto baud f...

Страница 87: ...r defines data consistency as the ability to complete the message packet construction before sending the packet to the CESAR generator This problem most often manifests as mysteriously changed values That is values at the CESAR generator seem to have changed automatically even though no command has executed or the values appear changed because one data bye contained the data that another data byte...

Страница 88: ...ing a procedure like this one you can ensure the data for a command will not be changed before the next download packet is received PROFIBUS Command Structure The PROFIBUS is command based Dressler defines a download packet outbytes and an upload packet inbytes as described in the following sections of this chapter Command lists follow Note Response times are fast so requested information is avail...

Страница 89: ...ng every PROFIBUS data exchange the CESAR generator supplies a 14 byte response to a download outbytes packet Table 4 10 lists the response or upload packet These bytes are also known as inbytes Table 4 10 Configuration of upload packet inbytes Byte Description 0 Status flags first byte 1 Status flags second byte 2 Delivered power low 3 Delivered power high 4 Forward power low 5 Forward power high...

Страница 90: ...ta extends over more than one byte the PROFIBUS sends the least significant byte LSB before the most significant byte MSB Byte 13 references the requesting command Host Port Ethernet Modbus TCP This section describes the Ethernet host port For information on the RS 232 host port see Host Port RS 232 With AE Bus on page 4 43 For information on the PROFIBUS host port see Host Port PROFIBUS on page 4...

Страница 91: ...P Instead a program running on the interface board accepts Modbus TCP packets from the Host sends appropriate AE Bus commands to the CESAR generator using the internal RS 232 interface and forms an appropriate reply packet The system supports up to 6 Modbus TCP connections to port 502 Registers are defined in an absolute zero based format Note When using third party tools make sure to select zero ...

Страница 92: ...R generator are atomic which prevents erasing problems However one client may overwrite another s configuration information Using Modbus TCP FC23 FC23 allows you to send any CESAR generator AE Bus command through the Modbus TCP interface providing complete control of the system in a way that directly corresponds to the AE Bus commands For a complete listing of the AE Bus commands and their associa...

Страница 93: ...Bus command number see Host Port Commands on page 4 61 for a complete list of commands 18 Number of bytes in AE Bus write packet Total number of bytes in the AE Bus packet for a description of the AE Bus packet see AE Bus Protocol on page 4 45 for information on the number of data bytes in each AE Bus command see Table 4 16 on page 4 63 19 and up AE Bus data bytes Data bytes contained in the AE Bu...

Страница 94: ...8 Byte counter Not used 9 AE Bus command number AE Bus command number see Table 4 16 on page 4 63 for a complete list of commands 10 Number of bytes in AE Bus response packet Total number of bytes in the AE Bus packet for a description of the AE Bus packet see AE Bus Protocol on page 4 45 for information on the number of data bytes in each AE Bus command see Table 4 16 on page 4 63 11 and up AE Bu...

Страница 95: ... for earlier versions of the software If you do not have the appropriate manual contact Customer Support see Customer Support on page 6 14 Note The unit reports the software revision level with host port command 198 see Table 4 16 on page 4 63 The following sections describe the command status response CSR codes returned by the CESAR generator in response to a host port command as well as the host...

Страница 96: ...ut on or off or changing a setting in the unit The unit responds to these commands by sending a command status response CSR This single byte response indicates whether the unit has accepted or rejected the command and in the case of rejection the reason the unit could not respond to the command For more information on CSR codes see Host Port Command Status Response CSR Codes on page 4 62 Table 4 1...

Страница 97: ...hrough 3 32 bit value Most host port commands are the same for all of the available interfaces Differences are noted where they exist Table 4 16 describes the CESAR generator host port commands Table 4 16 Host port commands Command Description Number of Host Data Bytes Number of Response Data Bytes 1 RF off Turns off RF output Read back with command 162 0 1 CSR only 2 RF on Turns on RF output Read...

Страница 98: ... 1 CSR only 5 reflected power limit Specifies the maximum reflected power Send two data bytes least significant byte first representing the reflected power limit as a percentage of nominal power Accepts a value of 1 of nominal power up to the specified limit Read back with command 170 2 1 CSR only 8 set point Specifies the output set point level for the selected regulation mode set with command 3 ...

Страница 99: ...o target life timer will count For more information see Setting a Target Lifetime on page 5 47 Read back with command 156 See also command 12 1 1 CSR only 12 AE Bus and Ethernet version set target life see next row for Profibus version of command Sets the target life in kilowatt hours of the specified target see command 11 Send five data bytes least significant byte first Byte 1 selects the target...

Страница 100: ... CSR only 13 tuner control Sets the tuner control if the CESAR generator is connected to a Dressler Variomatch unit through the matching interface For more information on this interface see Matching Interface on page 4 8 This command will not work with other matching networks unless they are electrically compatible and are connected through the Matching Interface connector Send one data byte 0 Man...

Страница 101: ...control for more information see CESAR Generator User Port Options on page 4 10 6 Local control through Front Panel for more information see Operating the CESAR Generator Using the Front Panel on page 5 24 Note If you try to change the control mode while the unit is on the unit automatically switches off Read back with command 155 1 1 CSR only Table 4 16 Host port commands Continued Command Descri...

Страница 102: ...18 41 Integral phase positive 42 Integral phase negative 43 Proportional phase positive 44 Proportional phase negative If FST is active modes 1 through 4 the frequency set with command 18 is used as the minimum frequency limit Ensure that this frequency is less than the maximum frequency before command 17 is used Note This command is not available on generators with fixed frequency For more inform...

Страница 103: ... Bus Ethernet version of command Sets the RF frequency Send three data bytes representing the RF frequency in 100 Hertz steps for example 10000 1 MHz Note This command is only available on generators with variable frequency Read back with command 178 3 1 CSR only 19 number of recipe steps Specifies the number of recipe steps Send one data byte representing the desired number of recipe steps Accept...

Страница 104: ... on page 5 45 Read back with command 191 3 1 CSR only 22 recipe step set point Specifies the set point for a given recipe step Send three data bytes least significant byte first Byte 1 selects the recipe step number 1 to 2 set with command 19 Bytes 2 and 3 specify the set point value Note The set point value must be within the operating range see Electrical specifications on page 3 4 For more info...

Страница 105: ...on parameters to EEPROM as a preset with the given number 0 to 5 1 1 CSR only 25 restore presets Restores the current operation parameters to EEPROM as preset with the given number 0 to 5 1 1 CSR only 27 set pulsing Sets the desired pulsing Send one data byte 0 Pulsing off 1 Internal pulsing 2 External pulsing 3 External pulsing inverted 4 Enable internal pulsing by external pulsing input See also...

Страница 106: ...abled Matching buttons disabled 42 RF On Off buttons disabled Rotating knob enabled Matching buttons disabled 43 RF On Off buttons enabled Rotating knob enabled Matching buttons disabled 44 RF On Off buttons disabled Rotating knob disabled Matching buttons enabled 45 RF On Off buttons enabled Rotating knob disabled Matching buttons enabled 46 RF On Off buttons disabled Rotating knob enabled Matchi...

Страница 107: ...data bytes least significant byte first representing the RF on ramping fall time in tenths of a second Read back with command 151 2 1 CSR only 33 set reflected power parameters Sets reflected power parameters Send three data bytes least significant byte first Byte 1 sets the number of seconds after reaching the limit set by bytes 2 and 3 until RF is turned off 4Accepts a value of 1 s to 255 s 40 O...

Страница 108: ...ion value is 0 Read back with command 212 3 1 CSR only 93 set pulsing frequency Sets the RF pulsing frequency Send three data bytes least significant byte first representing the pulsing frequency in Hertz Accepts a value of 1 to 100000 1 Hz to 100000 Hz Note Ensure the value does not exceed the specified maximum pulse frequency of the generator see Electrical Specifications on page 3 4 See also co...

Страница 109: ...ible and are connected through the Matching Interface connector For more information see Controlling the Matchbox on page 5 20 0 1 CSR only 112 move load capacitor position Moves the load capacitor motor of a connected Variomatch unit to the specified position For more information on this interface see Matching Interface on page 4 8 This command will not work with other matching networks unless th...

Страница 110: ... with other matching networks unless they are electrically compatible and are connected through the Matching Interface connector Send two data bytes to move the series motor to its new position Accepts a value of 0 to 1000 For more information see Setting Automatic Tune Control on page 5 22 Read back with command 175 2 1 CSR only 128 supply type Reports the generator type returns 5 ASCII character...

Страница 111: ...n this interface see Matching Interface on page 4 8 This command will not work with other matching networks unless they are electrically compatible and are connected through the Matching Interface connector Returns one data byte 0 Match network s motors stopped 1 Match network s motors running 0 1 151 report ramping rise and fall times Report on and off ramping rise and fall times The controller r...

Страница 112: ...ort regulation mode Reports regulation mode The controller returns one data byte representing the regulation mode 6 Forward power Pforward regulation 7 Load power Preal regulation 8 External power DC Bias regulation Set with command 3 0 1 155 report control mode Reports the control mode The controller returns one data byte representing the control mode 2 Host 4 User Port 6 Local Front Panel Set wi...

Страница 113: ... representing the desired target number 1 to 4 The controller returns the target life in hundredths of kilowatt hours for example 100 1 kWh Set with command 12 1 4 158 report User Port scaling Reports User Port analog voltage scaling Set with command 30 Table 4 16 Host port commands Continued Command Description Number of Host Data Bytes Number of Response Data Bytes ...

Страница 114: ... 1 On 6 RF on requested 0 Off 1 On 7 Set point status 0 Within tolerance 1 Out of tolerance 2nd status byte bit flags 0 End of target life 1 Reserved 2 Reserved 3 Overtemperature 4 Reserved 5 Reserved 6 Unassigned 7 Interlock open 3rd status byte bit flags 0 Reserved 1 Reserved 2 Reserved 3 Unassigned 4 Reserved 5 Out of set point 6 Reserved 7 Reserved continued on next page 0 4 Table 4 16 Host po...

Страница 115: ...tching control when the generator is connected to a Variomatch unit through the matching interface For more information on this interface see Matching Interface on page 4 8 This command will not work with other matching networks unless they are electrically compatible and are connected through the Matching Interface connector Returns one data byte 0 Manual control 1 Automatic control Set with comm...

Страница 116: ...eturns two data bytes representing the forward power in watts LSB first 0 2 166 report reflected power Reports a snapshot of reflected power level at that instant The controller returns two data bytes representing the reflected power in watts LSB first 0 2 167 report delivered power Reports a snapshot of delivered power level at that instant The controller returns two data bytes Both bytes represe...

Страница 117: ...icant byte first Bytes 1 and 2 report the current load position 0 to 1000 Bytes 3 and 4 report the current series position 0 to 1000 Set with commands 112 and 122 or by using the automatic tune process 0 4 177 report pulsing Reports pulsing settings The controller returns one data byte 0 Pulsing off 1 Internal pulsing 2 External pulsing 3 External pulsing inverted 4 Enable internal pulsing by exte...

Страница 118: ... with fixed frequency Set with command 17 0 3 188 report recipe step set point run time Reports the set point and run time for the selected recipe step Send one byte to select the desired recipe step The controller returns four data bytes Bytes 1 and 2 represent the recipe step set point in watts Bytes 3 and 4 represent the recipe step run time in tenths of seconds Set with commands 22 and 23 1 4 ...

Страница 119: ...cle in the percent of on time per cycle Set with command 96 0 2 198 report software revision level Reports the revision level of the software Used in conjunction with command 130 to obtain the version revision of the software for example 1 16 4 data bytes 4 ASCII characters 205 report run time Reports the total time that the generator was producing output power The controller returns four data byt...

Страница 120: ... 419200 438400 457600 4115200 Note For 115200 the return value is 0 Set with command 69 0 3 223 report error code register Retrieves the error code See also Checking for and Resolving Errors and Warnings on page 6 7 0 1 230 report sensor data Returns sensor data Bytes 0 and 1 Reserved Bytes 2 and 3 Condensation 0 4 231 report unit serial number The controller returns four data bytes representing t...

Страница 121: ...ts The CESAR generator is designed for 19 racks but may be used alternatively as a desktop model Regardless you must ensure proper air flow see Cooling Specifications on page 3 6 6 cm 2 4 required on the left and right sides for airflow 10 16 cm 4 required at rear for cable connections Additional space for connectors and cabling can be necessary Also allow adequate space for anyone who may need to...

Страница 122: ...rator with a matching network The CESAR generator is compatible with a Dressler Variomatch or a matching network with the same control functions and electronic topology Cables see also Connector Cable specifications on page 3 3 4Grounding cable 4Shielded coaxial cable for RF output Operating and maintenance personnel must receive proper training before installing troubleshooting or maintaining hig...

Страница 123: ...container for submitting necessary claims to the carrier INSTALLING THE CESAR GENERATOR The following sections explain how to install the unit Mounting the CESAR Generator The CESAR generator is designed to be built into 19 racks However the unit s compact outline dimensions also allow you to use the CESAR generator as a single desktop model To Mount the CESAR Generator 1 Select a position that en...

Страница 124: ...operation requires that you use a central common ground for the generator matching network and load Connecting RF Output Power The following illustration shows the output power connector and Table 5 1 describes each pin Figure 5 1 Output RF Out connector To Connect RF Output 1 Connect one end of a shielded coaxial cable of 50 Ωimpedance to the RF Out connector Do not attempt to turn on power until...

Страница 125: ...s see Understanding Model 1312 Options on page 1 2 Note Even if you are not using the User Port port for communication some User Port circuits must be satisfied to operate the CESAR generator For more information see CESAR Generator User Port Options on page 4 10 To Connect the Communication Interfaces Make each interface connection For specific information on the interface connections including p...

Страница 126: ...onal If you want the CESAR generator to control a matching network and or to read the DC self bias voltage you must connect a matching unit The CESAR generator is compatible with a Dressler Variomatch or a matching network with the same control functions and electronic topology For specific information on the Matching interface including pin descriptions see Matching Interface on page 4 8 To Conne...

Страница 127: ...asma Note In this type of operation slight differences in output frequency or in the phase of the RF energy can create variations in frequency that may have adverse affects To Make the CEX Connections Connect the CEX output of the master generator to the CEX input of up to three slave units by using T connectors for more than one slave Note The phase relationship between the RF power is affected b...

Страница 128: ...ng the AC mains cord with 230 VAC 187 VAC to 253 VAC 1 φ Note The ON OFF power switch does not completely disconnect the Mains You must install an external switch to completely disconnect Mains Before making any input line power connection turn off and lockout tagout all circuit breakers supplying input power to the CESAR generator Never connect the generator to the mains while the cabinet is open...

Страница 129: ...rough network cable The CESAR generator does not include this cable SETTING THE IP CONFIGURATION FOR ETHERNET COMMUNICATION The CESAR generator is shipped with the following default IP configuration IP address 192 168 111 111 Netmask address 255 255 255 0 Gateway address not set Before using the system you must reset the IP configuration to settings appropriate for your network Selecting an Approp...

Страница 130: ... to the BootP server using a standard straight through network cable 4 Power the CESAR generator on In approximately 30 seconds the CESAR generator will be visible to the BootP server and consequently your network at the address specified in step 2 To Change the IP Configuration Without BootP If you are using the Modbus CESAR generator in a non BootP environment you need to change the IP configura...

Страница 131: ... 13 for more information 2 Power on the system by turning the front panel ON OFF switch clockwise to a vertical position The initial front panel screen will display the CESAR generator model name the operating frequency the maximum RF power and the software version After five seconds the display will change to a standard operation screen 3 Listen to ensure the fans are rotating 4 On the front pane...

Страница 132: ...RF power and the software version After five seconds the display will change to a standard operation screen 3 Listen to ensure the fans are rotating 4 On the front panel set the Control by setting to User Port see Changing the Device Configuration Settings on page 5 40 5 Verify that you have selected the desired power regulation mode 4See User Port pins 1 and 2 in Table 4 4 on page 4 31 and Table ...

Страница 133: ...t there is external contact closure between Interlock pins 1 and 2 see Table 4 3 on page 4 30 2 Power on the system by turning the front panel ON OFF switch clockwise to a vertical position The initial front panel screen will display the CESAR generator model name the operating frequency the maximum RF power and the software version After five seconds the display will change to a standard operatio...

Страница 134: ...nerator for the First Time Using the Front Panel 1 Ensure that the User Port interlock signal is satisfied 4If you have a 25 pin User Port verify that there is external contact closure between pins 10 and 23 INTERLOCK LOOP See Table 4 2 on page 4 13 for more information 4If you have a 15 pin User Port verify that there is external contact closure between Interlock pins 1 and 2 see Table 4 3 on pag...

Страница 135: ...44 Setting Regulation Mode The CESAR generator is designed to regulate power into a broad range of output impedances The unit can operate in the following Forward power regulation Pforward In forward power regulation mode the CESAR Generator regulates RF power with constant forward power Load power regulation or delivered power regulation Preal In load power regulation mode the CESAR Generator reg...

Страница 136: ... the power value in watts or the DC bias value in volts f indicates forward power regulation real indicates load power regulation bias indicates external power regulation For example forward power regulation is selected in the following illustration SETTING FORWARD POWER REGULATION MODE PFORWARD In forward power regulation mode the CESAR Generator regulates RF power with constant forward power Thi...

Страница 137: ... the desired power set point between 0 W and 1 2 kW using the RF POWER dial knob Press the Increm Auto soft key to toggle between dynamic increments Auto and several fixed increments 5 Press Ok to confirm 6 Press Exit 7 Press Execute The operating screen will then display the forward power in watts the reflected power in watts and the Program and Display soft keys SETTING LOAD POWER REGULATION MOD...

Страница 138: ...to toggle between dynamic increments Auto and several fixed increments 5 Press Ok to confirm 6 Press Exit 7 Press Execute The operating screen will then display the load power in watts the reflected power in watts and the Program and Display soft keys SETTING EXTERNAL POWER REGULATION MODE DC BIAS In external power regulation mode the CESAR Generator regulates RF power at a constant DC self bias v...

Страница 139: ... DC Bias Regulation Using the CESAR Generator Front Panel Complete the following steps to select DC Bias regulation mode using the front panel 1 Press the Program soft key Control Settings appears on the display 2 Press Change 3 Press Control DC Bias 4 Set a DC Bias value using the RF POWER dial knob Press the Increm Auto soft key to toggle between dynamic increments Auto and several fixed increme...

Страница 140: ...ox is set to manual tune or automatic tune control To Determine the Tune Setting Through the Host Port If you are using RS 232 PROFIBUS or Ethernet to control and monitor the CESAR generator send command 163 see Table 4 16 on page 4 63 The controller will return the tune setting 0 Manual 1 Automatic Note You can also determine the capacitor limits and positions see host port commands 174 and 175 i...

Страница 141: ...ESAR Generator Front Panel Complete the following steps to set initial C Tune and C Load positions in Manual mode using the CESAR generator front panel 1 Press the Program soft key 2 Press Next until you see Match Settings on the display 3 Press Change 4 Press manual 5 Select the initial C Tune position using the RF POWER rotary dial knob 4You may select values between 4 and 96 6 Press Ok to confi...

Страница 142: ...n page 4 63 41 Automatic 1 Set the load capacitor position Send two data bytes for command 112 see Table 4 16 on page 4 63 2 Set the tune capacitor position Send two data bytes for command 122 see Table 4 16 on page 4 63 3 To manually change the tune positions from these initial positions see To Adjust the Tune and Load Capacitors Using the CESAR Generator Front Panel on page 5 44 See also Determi...

Страница 143: ...s on This feature is useful for different process recipes You can change the preset values to meet your specific process needs Appropriate preset values vary widely from application to application depending on operating variables such as the type of application gas the amount of pressure in the chamber and the configuration of the chamber To Determine Appropriate Preset Positions 1 In an experimen...

Страница 144: ...nel The following sections describe how to operate the CESAR Generator using the features Understanding the basic front panel control elements Using the front panel Program menu Setting and using Preset generator settings Using the display settings Controlling a Dressler Variomatch unit that connected to the generator through the matching interface Liquid crystal display Mains ON and OFF switch RF...

Страница 145: ...he CESAR generator turn the switch counter clockwise to a horizontal position Note The ON OFF power switch does not completely disconnect the Mains You must install an external switch to completely disconnect Mains LCD graphic display The liquid crystal display LCD allows you to read all operating conditions and power values Soft key functions The three soft keys located on the right side of the L...

Страница 146: ...sed to select various values in the Program menu See Using the Front Panel Program Menu on page 5 26 To increase a value rotate the control knob clockwise To decrease a value rotate the control knob counter clockwise Matching control of Variomatch unit The matching control allows you to control operation of a Variomatch matching network that is connected to the Matching Interface on the generator ...

Страница 147: ...ess Next to cycle through the menu until you reach a desired function Note You can only move forward through the program menu To return to a previous function displayed on the menu screen you must press Next repeatedly until you again reach the desired function Press Change to view the submenu for any particular function and follow the submenu prompts Press Exit to exit the program menu to quit a ...

Страница 148: ...ry knob Use the soft keys to make menu selections and use the RF POWER rotary knob to set specific values Then press the appropriate soft key to save that value Note You can only move forward through the program menu To return to a previous function displayed on the menu screen you must press Next repeatedly until you again reach the desired function For more specific menu information see Front Pa...

Страница 149: ...ol Settings Match Settings Pulse Settings Recipe Settings Control Pforward Control Preal auto manual C Tune C Load Internal External Pulse Freq Duty Cycle Rise Fall RF Rise Time RF Fall Time Time Frames 1 4 Ok Time Frame T2 Time Frame T3 Time Frame T4 Start Value Final Value Time Frame T1 Pforward Off More Control DC Bias DC Bias Preal Power Ramping Off Remote Control Override RF On Off RF Pwr Set...

Страница 150: ...th constant forward power Load power regulation or delivered power regulation Preal Pulse Input Hi RFon Lo RFoff Hi RFoff Lo RFon Refl Power Settings Pulse Input Configuration Prfl Threshold RF off after Ok On Off Pwr Interrupt Device Configuration Displ Contrast Ok Analog I O MAX DCBias Scaling Ok Active Target 1 4 Energy MAX Ok On Off Reset Counter Prefl Limit Ok Ok Pulse Input Hi CW Lo Pulse Hi...

Страница 151: ...ation mode set the desired power set point between 0 W and 1 2 kW using a combination of the Increm Auto key and the RF POWER dial knob 6 For DC Bias control set a DC Bias value using a combination of the Increm Auto key and the RF POWER dial knob 4The value can be between 0 V and 4000 V Note 4000 V is the default value To change the default settings see To Change the Default Device Configuration ...

Страница 152: ...utomatically adjust the capacitor positions and minimize reflected power See Setting Automatic Tune Control on page 5 22 for additional information To Select Tuning Control Using the CESAR Generator Front Panel 1 Press the Program soft key 2 Press Next until you see Match Settings on the display 3 Press Change 4 Press auto for automatic tune control press man for manual tune control 5 Select the d...

Страница 153: ... 3 Press Change 4 Press Internal for internal pulsing press External for external pulsing 5 For internal pulsing a Select the desired Pulse Freq value between 1 Hz and 30 kHz or less depending on the factory setting for pulsing using a combination of the Increm Auto button and the RF POWER rotary dial knob b Press Ok to confirm c Select a duty cycle value between 1 to 99 using the RF POWER rotary ...

Страница 154: ...d rising edge of the RF power 2 Power ramping Power ramping allows you to determine the shape of a power ramp within a specified time frame There are four programmable time frames To Create the Rise fall Recipe Using the CESAR Generator Front Panel 1 Press the Program soft key 2 Press Next until you see Recipe Settings on the display 3 Press Change 4 Press Rise Fall 5 Set the RF rise time between ...

Страница 155: ...em Auto key and the RF POWER rotary knob g Press Ok to confirm h Set a time for T2 the recipe s second power ramp between 0 1 and 60 minutes using a combination of the Increm Auto key and the RF POWER rotary knob i Press Ok to confirm j The Start Power value will display as the final value of T1 set a Final Value for T2 between 0 W and 1 2 kW using a combination of the Increm Auto key and the RF P...

Страница 156: ... continue at the same position you stopped at before To Turn Off the Recipe Settings Feature Using the CESAR Generator Front Panel 1 Press the Program soft key 2 Press Next until you see Recipe Settings on the display 3 Press Change 4 Press Off to turn off the feature 5 Press the Exit soft key 6 Press the Execute soft key For 8 minutes a linear increasing power level from 150 W to 895 W For 6 minu...

Страница 157: ... front panel controls are disabled To Select Remote Control Override Using the CESAR Generator Front Panel 1 Press the Program soft key 2 Press Next until you see Remote Control Override on the display 3 Press Change 4 To use the RF ON OFF front panel controls press On Off Keys to leave these controls as remote functions only press Remote 5 To use the Rot Knob front panel control press Rot Knob to...

Страница 158: ... counter 5 Select an Active Target 1 to 4 using the RF POWER rotary knob 6 Select the Energy MAX between 0 01 kWh and 21600 kWh using a combination of the Auto Increm button and the RF POWER rotary knob 7 Press Ok to confirm 8 Press the Exit soft key 9 Press the Execute soft key To Turn Off the Target Lifetime Feature Using the CESAR Generator Front Panel 1 Press the Program soft key 2 Press Next ...

Страница 159: ...il you see Reflected Power Settings on the display 3 Press Change 4 Set a Prefl Threshold between 20 W and 200 W using the RF POWER rotary knob 5 Press Ok 6 If you want the generator to shut off when it reaches this limit for a specified period of time press On Otherwise press Off a If you select On 4 Set the desired max refl value between 12 W and 180 W using the RF POWER rotary dial knob 4Set th...

Страница 160: ...rnal pulsing choose from 4Hi CW Low Pulse This setting switches between internal pulsing and continuous power with the pulse input at a high state 4Hi Pulse Low CW This setting switches between internal pulsing and continuous power with the pulse input at a low state 4Off This setting disables the pulse input Normal internal pulsing is used 5 Press the Exit soft key 6 Press the Execute soft key CH...

Страница 161: ...00 or 115200 Note To determine if you have an RS 232 port see Understanding Model 1312 Options on page 1 2 RS232 protocol If your CESAR generator has an RS232 port the RS 232 protocol is factory set to AE Bus and most CESAR generators will use the default AE Bus protocol see AE Bus Protocol on page 4 45 However a previous protocol Dressler is available for compatibility Note To determine if you ha...

Страница 162: ...tor Settings for Different Applications You can set the various front panel functions to meet your specific process needs and you can store up to five presets 1 through 5 for five different applications The presets store all settings in the program menu except pulse input configuration and device configuration Preset 0 is reserved for factory settings and can be accessed read only To Store a Prese...

Страница 163: ...4 8 Note These keys only control a Variomatch that is connected to the matching interface of the generator These keys can not be used to control any other matching networks unless they are electrically compatible and are connected through the Matching Interface connector If you wish to use the Host port for primary generator control yet retain Variomatch control on the front panel you must set the...

Страница 164: ...ulsing Function The CESAR generator s pulse function allows you to switch on the RF power at a given set point and switch it off with the pulse frequency You may select between Internal pulsing Internal pulsing modifies the pulse repetition frequency PRF The waveform is always a rectangle the power is given by the set point The internal pulse generator is configurable for pulse frequencies between...

Страница 165: ...ytes least significant byte first for command 96 representing the duty cycle as a percentage seeTable 4 16 on page 4 63 To Select Internal or External Pulsing Using the CESAR Generator Front Panel see instructions on page 5 33 Creating Recipes This feature enables you to create a power profile that may provide up to four time frames You can choose to program one of the two recipe settings using th...

Страница 166: ... recipes Send one data byte for command 19 representing the desired number of recipe steps 2 Specify the ramp time for each given recipe using command 21 a Send one byte to select the step number 1 to 2 b Send two bytes to set the ramp time value 3 Specify the set point for each given recipe step using command 22 a Send one byte to select the recipe step number 1 to 2 b Send two bytes to specify t...

Страница 167: ...e Generator on page 5 43 for detailed information on these front panel control keys and how to use them Note Normally when using remote control all front panel controls are disabled To Select Remote Control Override Through the Host Port If you are using RS 232 PROFIBUS or Ethernet to control and monitor the CESAR generator 1 Send command 29 see Table 4 16 on page 4 63 To Select Remote Control Ove...

Страница 168: ...tings Normally a generator delivers continuous reflected power however the CESAR generator allows you to set a value at which the forward power will fold back when the reflected power reaches a certain limit for a specified period of time The Reflected Power Settings menu allows you to create a reaction profile to shut off RF power when the reflected power reaches this limit To Set a Reflected Pow...

Страница 169: ...he CESAR generator s IP address into the Web browser Address field If you have trouble connecting ensure that The CESAR generator is connected to the network through the Ethernet port see Connecting and Setting Ethernet Modbus TCP Communication on page 5 9 for more information The CESAR generator is receiving proper input power for specifications see Chapter 3 Electrical Specifications You are typ...

Страница 170: ...5 50 Installation Setup and Operation CESAR 1312 E Dressler HF Technik GmbH ...

Страница 171: ...ff 2 Check for visible damage to the unit cables and connectors 3 Ensure that all unit connectors are installed correctly and fastened tightly 4 Check to determine whether any system related circuit breakers have been tripped 5 Verify that the input power to the unit meets specifications 6 Ensure ground connections are adequate and secure Checks With the Power On 1 Check the unit s input and remot...

Страница 172: ...ied 4If yes go to the next step 4If unsure or no see Interlock Not Satisfied on page 6 3 4 Is the front panel display LCD lit 4If yes go to the next step 4If no see Front Panel Display LCD Not Lit on page 6 4 5 Check the front panel display for any fault EXX or warning WXX messages 4If there is no warning or error message on the display go to the next step 4If there is an error or warning message ...

Страница 173: ...for the generator matching network and load 4If yes go to the next step 4If unsure or no see Improper Grounding on page 6 6 5 Did you establish the correct interface connection for remote control of the matching network 4If yes but you are still having trouble refer to the troubleshooting section of the matching network manual 4If unsure or no see Improper Interface Connection on page 6 6 6 If the...

Страница 174: ...s matches the specifications listed in the associated sections of Chapter 4 Communication Interfaces Incorrect baud rate RS 232 Host port only Ensure that the baud rate used by the host computer and the baud rate set in the CESAR generator are the same see RS 232 Transmission Parameters on page 4 44 Incorrect or corrupt data packet Verify that the data packet has been set up correctly see AE Bus P...

Страница 175: ...not correspond to basic application parameters such as impedance current voltage phase angle forward power and reflected power These problems can include Difficulty igniting plasma Difficulty achieving expected minimum reflected power with manual or automatic tuning by the matching network Arcing inside the matching network You can change the impedance range of the Variomatch by changing the Vario...

Страница 176: ...mproper Grounding Proper operation requires that you use a central common ground for the generator matching network and load Ensure that you have appropriate grounding for all elements of the system For more information see Grounding on page 5 4 and the installation section of the matching network manual Improper Interface Connection Dressler CESAR generators and Variomatch matching networks are e...

Страница 177: ...r Support on page 6 14 The unit reports the software revision level with host port command 198 see Table 4 16 on page 4 63 Error conditions always turn output off If multiple error conditions exist the unit displays all errors When operating in front panel control mode you need to reset the unit after the condition that caused the error has been resolved Once the condition is resolved the front pa...

Страница 178: ...king the proper connections to satisfy the interlock If you have a 25 pin User Port see pins 10 and 23 in Table 4 2 on page 4 13 If you have a 15 pin User Port and 9 pin Interlock connector ensure external contact closure between pins 1 and 2 of the Interlock connector see Table 4 3 on page 4 30 Note To determine which communication interfaces you have see Understanding Model 1312 Options on page ...

Страница 179: ...ynchronization loss Causes EMC problem Software fault AMR module defective Solution Switch generator off and on again ensure installation and operating environment comply with EMC requirements see Product Compliance on page 1 5 and Installing the CESAR Generator on page 5 3 If problem persists contact Customer Support see Customer Support on page 6 14 E91 DDS VCO Communication Failure Software con...

Страница 180: ... warning is active the unit is not meeting set point On the front panel overload messages end with an exclamation point E97 Invalid EEPROM Contents Controller fault Parameter data is corrupt Cause Checksum error or invalid data Solution Switch generator off and on again If this error persists contact Customer Support see Customer Support on page 6 14 E98 Invalid Calibration Data Controller fault C...

Страница 181: ...m forward power The unit has reduced forward power output to remain within the limits Output is not at set point Cause VSWR is too high Solution Reduce VSWR W12 Prefl at limit The reflected power has exceeded the maximum level The unit has reduced forward power output to remain within the limits Output is not at set point Cause VSWR is too high Solution Reduce VSWR W13 Pforw at limit This warning ...

Страница 182: ... the duty cycle is too low for the actual pulse repetition frequency Solution Change the external pulse frequency to be within limits See Electrical Specifications on page 3 4 for pulse frequency limits You can change the pulse frequency the Host port command 93 see Table 4 16 on page 4 63 or through the front panel see Setting the Pulse Function on page 5 33 W41 Frequency at limit In frequency sh...

Страница 183: ...CESAR 1312 E Troubleshooting and Customer Support 6 13 CESAR 1312 Generator http www dressler com You may also visit our parent company s World Wide Web site http www advanced energy com ...

Страница 184: ...se 32 D 70794 Filderstadt Bonlanden Note For returns and repairs call Customer Support prior to shipping Phone 49 2402 9881 0 Fax 49 2402 988 11 Email technical support dressler com Phone 49 711 779270 Fax 49 711 7778700 Email support_de aei com Note Response to emails by end of next business day USA Dressler USA Inc 6389 San Ignacio Avenue San Jose CA 95119 AE World Headquarters 1625 Sharp Point ...

Страница 185: ...4 1869 325004 Email aeuk_sales info aei com Japan Astech Corporation No 39 7 Takadanobaba 4 Chome Shinjuku Ku 169 0075 Tokyo Phone 81 3 3367 8921 Fax 81 3 3367 8996 Email semicon astechcorp co jp South Korea Advanced Energy Korea 701 Sicox Tower 513 4 Sangdaewon dong Chungwon gu Sungnam si Kyunggi do Korea 462 120 Phone 82 31 777 9191 Fax 82 31 777 9195 Email AEK_sales info aei com Taiwan Advanced...

Страница 186: ...s are warranted to be free from failures due to defects in material and workmanship for 12 months 24 months in Europe after they are shipped from the factory please see warranty statement below for details In order to claim shipping or handling damage you must inspect the delivered goods and report such damage to Dressler HF Technik GmbH within 30 days of your receipt of the goods Please note that...

Страница 187: ...hantable or fit for any particular purpose except as specifically stated in printed specifications The sole responsibility of the Seller shall be that it will manufacture the goods in accordance with its published specifications and that the goods will be free from defects in material and workmanship The seller s liability for breach of an expressed warranty shall exist only if the goods are insta...

Страница 188: ...6 18 Troubleshooting and Customer Support CESAR 1312 E Dressler HF Technik GmbH ...

Страница 189: ...ing baud rates 4 86 reporting capacitor positions 4 83 reporting control method 4 78 reporting DC bias 4 82 reporting external feedback 4 82 reporting forward power 4 82 reporting forward power limit 4 83 reporting frequency tuning parameters 4 84 reporting generator type 4 76 reporting generator s output capacity 4 76 reporting process status 4 80 reporting pulsing mode 4 83 reporting pulsing par...

Страница 190: ...ions 3 4 customer service see customer support customer support 6 14 before contacting 6 1 D data data bytes 4 47 data consistency PROFIBUS 4 53 delivered power specifications 3 5 description general 2 1 diagnostic interface 4 8 digital port see Host port dimensions 3 2 3 3 directives 73 23 EEC 1 6 89 336 EEC 1 5 display see panel display download packet PROFIBUS 4 54 drawings see illustrations E ...

Страница 191: ...munications optional length byte 4 47 communications transaction 4 48 communications transaction example 4 50 communications transaction illustration 4 48 4 50 connector 4 44 illustration 4 44 pin descriptions 4 44 I icons in user manual 1 3 on unit 1 4 illustrations 4 22 Host port RS 232 4 44 Host port RS 232 communications transaction 4 48 Host port RS 232 connector 4 44 Host port RS 232 transac...

Страница 192: ...requirements 4 11 normal 5 15 5 24 theory 2 2 operation modes setting with the User port 15 pin 4 35 optional length byte 4 47 output enabling through User port 25 pin 4 11 maximum specifications 3 5 minimum specifications 3 5 specifications 3 5 output connector pin descriptions 5 4 specifications 3 3 output frequency specifications 3 5 output power connecting 5 4 overcurrent specifications 3 5 ov...

Страница 193: ... S safety checks 6 1 conditions of use 1 6 directives 1 5 directives see also directives standards 1 5 standards see also standards schematics see illustrations selecting Ethernet host control 4 62 selecting RS 232 host control 4 62 selecting the User Port 25 pin 4 12 selecting see setting serial port see Host port setting PROFIBUS address 4 52 PROFIBUS baud rate 4 52 Siemens Energy Automation 4 5...

Страница 194: ...r 4 34 setting a set point 4 34 setting operation modes 4 35 setting the operating mode 4 31 wiring diagrams 4 36 User Port 25 pin activating 4 12 User port 25 pin 4 10 analog inputs 4 20 analog outputs 4 21 cable requirements 4 11 connector 4 11 digital inputs 4 21 digital outputs 4 21 electrical characteristics 4 20 enabling RF power 4 15 monitoring forward power 4 14 monitoring load power 4 14 ...

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