Ulvac CRYO-U Series, Instruction Manual

Page: 106 / 106

Revisions
R-2 ULVAC CRYOGENICS INCORPORATED
2013-06-13
2013-10-03
2013-11-08
2014-02-13
2017-11-06
2019-05-09
2013JE10
2013OR11
2013NR12
2014FY13
2017NR14
2019MY15
revised.
P.6-3 The content of
“◇
Assisted war-up using a heater
”
and
a CAUTION section have been revised.
P.6-3/6-5 Section 6.4 Regeneration Flow Chart
The contents of
“Ⅲ
. Pressure buildup check
”
has been
revised.
P.8-2 Table 8-1 Maintenance parts and intervals
R20, R20R, RM20, R50, R50R, and RM50 refrigerator unit
have been removed.
P.8-3 Table 8-3 CRYO-U®8H, U®8HSP, U®8H-U, U®8HL
Consumables
O-ring for U®8HL roughing port has been added.
Table A-1 CRYOPUMP Fault Diagnosis has been revised.
Yokkaichi CS contact information has been changed.
Cover: Export control policy has been revised.
“
SERVICE NETWORK” has been revised.
Cover: Export control policy has been revised.
“
Introduction” has been revised.
“
SERVICE NETWORK” has been revised.
“
SERVICE NETWORK” has been revised.
P.S-7 Figure 2 The description on "Exhaust line" has been
modified.
“Table1-1 Specifications” has been modified.
“1.3 Environmental Requirements” has been added.
“8. Maintenance” has been revised.
“Appendix F Dew Condensation” has been added.
“SERVICE NETWORK” has been revised.
“Table1-1 Specifications” has been modified.