CRYO-U
®
Cryopump Instruction Manual
ULVAC CRYOGENICS INCORPORATED
1-5
(Unit: mm)
Figure
1-2 External Drawing of CRYO-U
®
Cryopump (Continued)
[CRYO-U
®
8HSP] [CRYO-U
®
8H-U]
UVG-200
6B
ANSI
A
337.8 337.8
B
523.7 523.7
C
Φ
300
Φ
279
D
Φ
203.2
Φ
203.2
UVG-200 6B
ANSI UFC253
C
φ
300
φ
279
φ
253.2
110
110
110
110
C
φ254
3
13.
6
(60
2.5)
87.
5
78.5
78.5
C
A
B
D
Summary of Contents for CRYO-U Series
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