Ulvac CRYO-U Series, Instruction Manual, Page: 91 / 106

CRYO-U ® Cryopump Instruction Manual
MA0B001E,2010.01 ULVAC CRYOGENICS INCORPORATED B-1
Appendix B
FLEXIBLE HOSE
１．
Specifications
・
Gas
：
Helium Gas
（
Purity
：
99.999
％
or more
）
・
Pressure
：
Max. 2.45MPaG
・
Temperature
：
0 to 70
℃
・
Material
：
SUS304
・
Length
：
3000mm (standard)
・
Minimum Bending Radius
：
250mm
・
Recommended Torque for Connecting
：
20N
･
m
※
It is fastened and crowded until self seal coupling stops turning.
・
Connection
：
1/2B self-sealing coupling
２．
Precaution in Handling
・
When carrying the flexible hose, hold the braid support of the hose. If it is bended
forcibly at an acute angle, it may be damaged.
・
Avoid twisting the flexible hose especially when making final connection.
・
Keep away from water and salt to prevent corrosion. Do not put heavy things on the
flexible hoses in order to prevent modification and crushing of them.
CAUTION