Ulvac CRYO-U Series, Instruction Manual, Page: 96 / 106

Principles of Cryopump Operation
D-2 ULVAC CRYOGENICS INCORPORATED
Temperature (K)
[R.E.Honing and H.O.Hook: RCA Review (Sept. 1960)]
Figure D-1 Vapor Pressure of Various Kinds of Gas
10
-11
0 20 50
100
130
150
200
Va
p
or
Pr
es
s
u
re
（
Pa
）
He
H
2
Ne
N
2
CO
O
2
Ar CH
4
CO
2
Cl
2
NH
3
Br
2
H
2
O
10
5
10
3
10
1
10
-1
10
-3
10
-5
10
-7
10
-9