MZIW002E,2018JE01
ULVAC CRYOGENICS INCORPORATED
IW-1
Disposal Considerations
Disposal of our products must be done in accordance with applicable national and local
laws and regulations.
We provide Safety Data Sheet (SDS) of our products upon your request.
Please contact us if necessary.
WARNING
The cryopumps or cryocoolers may contain residue of hazardous substances resulting
from actual use. Contact your safety supervisor and follow the instructions to remove
such toxic substances before disposing.
Summary of Contents for CRYO-U Series
Page 2: ......
Page 8: ...F 6 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...
Page 24: ...This page intentionally left blank S 12 ULVAC CRYOGENICS INCORPORATED...
Page 26: ...IW 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...
Page 36: ...Cryopump Description 1 10 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...
Page 50: ...Installation 4 10 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...
Page 64: ...Regeneration 6 8 ULVAC CRYOGENICS INCORPORATED This page intentioanlly left blank...
Page 68: ...Disconnection and Storage 7 4 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...
Page 82: ...Maintenance 8 14 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...
Page 90: ...Troubleshooting A 8 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...
Page 92: ...Flexible Hose B 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...
Page 104: ...CS 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...