Ulvac CRYO-U Series, Instruction Manual, Page: 83 / 106

CRYO-U
®
Cryopump Instruction Manual
MA0A001E.2012JE01 ULVAC CRYOGENICS INCORPORATED A-1
Appendix A
Troubleshooting
Most of breakdowns of CRYO-U
®
cryopump come to light as a rise in temperature
and/or pressure through the following two routes.
(1) Refrigerator broken down
→
Cryogenic performance lowers
→
Temperature rises
→
Pressure rises
(In case of the breakdown of the refrigerator, the rise in temperature or pressure
will rapidly occur in minutes or hours)
(2) 80K shield and 15K cryopanel contaminated
→
Thermal load increases
→
Temperature rises
→
Pressure rises
(In this case, the rise in temperature or pressure will usually slowly occur in
months or years according to the use environment.)
Regarding various potential failures, the item
Ⅰ
to
Ⅶ
in Table A-1 explains its
cause and measure respectively. When the trouble cannot be solved, please contact
our Service Engineering Division or the nearest customer support center.