Ulvac CRYO-U Series, Instruction Manual

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CRYO-U
®
Cryopump Instruction Manual
ULVAC CRYOGENICS INCORPORATED A-7
Table A-2 Operating Log
CRYOPUMP S/N CRYO-U
®
OPERATING
LOG
POWER
Ｖ× φ
COMPRESSOR S/N
REFRIGERATOR S/N
Measuring condition Compressor unit
Cryopump
Remarks
Temperature Pressure
D
a
te
T
im
e
M
e
a
su
re
r
R
o
o
m
te
m
p
.
【
℃
】
H
u
m
id
ity
【
%
】
E
T
M
H
ig
h
p
re
s
s
u
re
h
e
liu
m
gas
【
M
P
a
G
】
C
u
rr
e
n
t
【
Ａ
】
C
o
o
lin
g
w
a
te
r
flo
w
r
a
te
【
L
/m
in
(*
)
】
1
st
stage 2
nd
stage
【
Pa
】
K
th
e
rm
o
co
u
p
le
M
B
S
-C
H
2
V
P
e
tc
(*) Measure cooling water flow rate with flow meters for each compressor unit.