Ulvac CRYO-U Series, Instruction Manual

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Inspection
2-2
ULVAC CRYOGENICS INCORPORATED
2.2 First Inspection of Cryopump
Open the shipping carton and conduct the following.
1. Confirm there is neither damage nor a dent in externals and accessories of the
pump, and is moreover no missing parts.
2. Remove the protective cover and confirm that there is no damage in the
mounting flange or 80K baffle. (After the inspection, the protective cover should
be put on again until the time of installation.)
3. Notice to “Hydrogen Vapor Pressure Gauge” users:
Make sure that the charge pressure shows 0.35
±
0.02 MPaG at room
temperature. The pressure depends on the room temperature. If it is lower than
0.3 MPaG in ambient temperature range of 20
℃ ±
10
℃
, there is a possibility of
hydrogen leakage or defects of the pressure gauge.
4. For optional devices such as MBS-C CRYO-METER, please refer to instruction
manuals of each device for more information.
If you find any missing parts or damages of the product, please contact our Service
Engineering Division or the nearest Customer Support Center.